Results 51 to 60 of about 14,575 (156)
Chemical mechanical polishing (CMP) has been a standard technique in semiconductor manufacturing for achieving smooth surfaces. CMP utilizes a synergistic interplay of chemical and mechanical interactions to achieve the desired removal rates, selectivity,
Mohamed Ahmed +6 more
doaj +1 more source
Effect of slurry composition on the chemical mechanical polishing of thin diamond films
Nanocrystalline diamond (NCD) thin films grown by chemical vapour deposition have an intrinsic surface roughness, which hinders the development and performance of the films’ various applications. Traditional methods of diamond polishing are not effective
Jessica M. Werrell +7 more
doaj +1 more source
Abstract Overfoaming remains a critical challenge in industrial bioprocesses, compromising mass transfer, operational stability, and downstream efficiency in bioreactors and wastewater treatment systems. This study provides a bibliometric and scientometric assessment of nanoparticle‐enabled foam control to map technological trends and identify research
Antonio Átila Menezes Ferreira +6 more
wiley +1 more source
Keggin‐type Al‐POM‐coated silica achieves selective surface oxidation of amorphous carbon through electrostatic attraction and proton‐coupled oxidation, tailoring interfacial properties for lithium‐ion batteries and semiconductor processes. ABSTRACT Amorphous carbon is widely used in energy storage and semiconductor technologies, where surface ...
Ganggyu Lee +13 more
wiley +1 more source
Chemical mechanical polishing (CMP) is a key process for global planarization of silicon wafers for semiconductors and AlTiC wafers for magnetic heads. Removal rate of wafer material is directly dependent on the surface roughness of a CMP pad, thus the ...
W. Choi +4 more
semanticscholar +1 more source
A Novel Laboratorial Approach to Evaluate Bacterial Microleakage of Endodontic Sealers
Abstract To avoid failure of endodontic treatment, it is important to properly seal the root canals after chemomechanical preparation in order to avoid microleakage. Typically, sealing involves the use of gutta‐percha and sealing cement, the latter of which adheres to the dentin and fills the spaces between the gutta‐percha and the dentin walls ...
Emannuel Fonseca Thomé da Silva Monteiro +11 more
wiley +1 more source
Monodisperse SiO2 Spheres: Efficient Synthesis and Applications in Chemical Mechanical Polishing
The atomic level polishing of a material surface affects the accuracy of devices and the application of materials. Silica slurries play an important role in chemical mechanical polishing (CMP) by polishing the material surface.
Jinlong Ge +7 more
doaj +1 more source
Optimization of CMP solution for yttrium aluminum garnet crystal
Yttrium aluminum garnet (YAG) crystal is widely used as gain medium in laser device due to its excellent physical, chemical and optical properties. However, current process can hardly satisfy the requirements of high efficiency and high quality in YAG ...
ZHANG Zili +4 more
doaj
This review summarizes recent advances in chemical mechanical polishing abrasives based on CeO2, SiO2, Al2O3, and emerging nanomaterials, highlighting how structural engineering and interfacial chemistry govern material removal and surface quality. Mechanism‐driven abrasive design is identified as a key pathway toward high selectivity, low damage, and ...
Wenqi Tang +11 more
wiley +1 more source
Chemical Mechanical Polishing (CMP) is a critical process in many industries where achieving superior surface quality through controlled material removal rates by using nano-abrasives is essential.
Houda Bellahsene +5 more
doaj +1 more source

