Results 131 to 140 of about 2,629 (140)
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Ultrathin TiN Membranes as a Technology Platform for CMOS‐Integrated MEMS and BioMEMS Devices
Advanced Functional Materials, 2011exaly
Integrated Inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems
Sensors, 2007Hidekuni Takao
exaly
CMOS-SOI-MEMS Transistor for Uncooled IR Imaging
IEEE Transactions on Electron Devices, 2009Yael Nemirovsky
exaly
Piezoelectric aluminum nitride thin films for CMOS compatible MEMS: Sputter deposition and doping
Critical Reviews in Solid State and Materials SciencesRui M R Pinto, Sandeep, Nagaraja K K
exaly
Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range
IEEE Electron Device Letters, 2008exaly
A high precision SOI MEMS–CMOS ±4g piezoresistive accelerometer
Sensors and Actuators A: Physical, 2014exaly
CMOS-MEMS membrane for audio-frequency acoustic actuation
Sensors and Actuators A: Physical, 2002exaly