Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process. [PDF]
Sci Rep, 2018 Cai C, Tan J, Hua D, Qin M, Zhu N.
europepmc +1 more source
Measurement device for cmos-mems accelerometer
, 2014 [CATALÀ] Aquest projecte mostra el procés de desenvolupament de la placa de circuit imprès (PCB) - Zephyr pel xip de test de l'acceleròmetre CMOS-MEMS Bailed II. El problema del desajust de la capacitat al pont d'entrada s'ha resolt mitjançant una xarxa de resistències, jumpers i condensadors simple i innovadora implementada en el circuit imprès.
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A 0.35-μm CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. [PDF]
Micromachines (Basel), 2018 Perelló-Roig R +4 more
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Sensitivity Enhancement of Silicon-on-Insulator CMOS MEMS Thermal Hot-Film Flow Sensors by Minimizing Membrane Conductive Heat Losses. [PDF]
Sensors (Basel), 2019 Mehmood Z, Haneef I, Ali SZ, Udrea F.
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Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection. [PDF]
Sensors (Basel), 2018 Maruyama S +3 more
europepmc +1 more source
Design and Implementation of a Low-Noise Analog Front-End Circuit for MEMS Capacitive Accelerometers. [PDF]
Micromachines (Basel)Gong K, Li J, Wang X, Cao H, Xie H.
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A Sub-1G CMOS-MEMS Accelerometer
A Sub-1G CMOS-MEMS Accelerometeridentifier:oai:t2r2.star.titech.ac.jp ...
openaire
A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure. [PDF]
Micromachines (Basel), 2016 Huang JQ, Li B, Chen W.
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Cryogenic performance evaluation of commercial SP4T microelectromechanical switch for quantum computing applications. [PDF]
Microsyst NanoengLee YB +5 more
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Development of Vacuum-Chamber-Type Capacitive Micro-Pressure Sensors. [PDF]
Micromachines (Basel)Yang LJ +5 more
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