A 0.35-μm CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. [PDF]
Micromachines (Basel), 2018 Perelló-Roig R +4 more
europepmc +1 more source
Sensitivity Enhancement of Silicon-on-Insulator CMOS MEMS Thermal Hot-Film Flow Sensors by Minimizing Membrane Conductive Heat Losses. [PDF]
Sensors (Basel), 2019 Mehmood Z, Haneef I, Ali SZ, Udrea F.
europepmc +1 more source
Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection. [PDF]
Sensors (Basel), 2018 Maruyama S +3 more
europepmc +1 more source
CMOS ROIC for MEMS Acceleration Sensor
Journal of IKEEE, 2014 Eun-Jung Yoon +2 more
openaire +2 more sources
Measurement device for cmos-mems accelerometer
, 2014 [CATALÀ] Aquest projecte mostra el procés de desenvolupament de la placa de circuit imprès (PCB) - Zephyr pel xip de test de l'acceleròmetre CMOS-MEMS Bailed II. El problema del desajust de la capacitat al pont d'entrada s'ha resolt mitjançant una xarxa de resistències, jumpers i condensadors simple i innovadora implementada en el circuit imprès.
openaire +1 more source
Physics and applications of Si-based nanoelectromechanical information devices (Plenary Talk)
, 2007 Mizuta, Hiroshi +2 more
core
A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology
A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technologyidentifier:oai:t2r2.star.titech.ac.jp ...
openaire
A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure. [PDF]
Micromachines (Basel), 2016 Huang JQ, Li B, Chen W.
europepmc +1 more source
Cryogenic performance evaluation of commercial SP4T microelectromechanical switch for quantum computing applications. [PDF]
Microsyst NanoengLee YB +5 more
europepmc +1 more source
Development of Vacuum-Chamber-Type Capacitive Micro-Pressure Sensors. [PDF]
Micromachines (Basel)Yang LJ +5 more
europepmc +1 more source