Optimization of a Piezoelectric Energy Harvester and Design of a Charge Pump Converter for CMOS-MEMS Monolithic Integration. [PDF]
Sensors (Basel), 2019 Duque M +4 more
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Using MEMS Capacitive Switches in Tunable RF Amplifiers
EURASIP Journal on Wireless Communications and Networking, 2006 A MEMS capacitive switch suitable for use in tunable RF amplifiers is described. A MEMS switch is designed, fabricated, and characterized with physical and RF measurements for inclusion in simulations.
doaj
Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process. [PDF]
Sci Rep, 2018 Cai C, Tan J, Hua D, Qin M, Zhu N.
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A 0.35-μm CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. [PDF]
Micromachines (Basel), 2018 Perelló-Roig R +4 more
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CMOS Readout Interfaces for MEMS Capacitive Microphones.
, 2009 This dissertation demonstrates the feasibility of three novel low-power and low-noise schemes for the readout interfaces of MEMS Capacitive Microphones (MCM) by presenting their detailed design descriptions and measurement results as application-specific ICs (ASIC) in CMOS technology developed to exploit their application scope in consumer electronics ...
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Sensitivity Enhancement of Silicon-on-Insulator CMOS MEMS Thermal Hot-Film Flow Sensors by Minimizing Membrane Conductive Heat Losses. [PDF]
Sensors (Basel), 2019 Mehmood Z, Haneef I, Ali SZ, Udrea F.
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Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection. [PDF]
Sensors (Basel), 2018 Maruyama S +3 more
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A CMOS-MEMS cantilever sensor for capnometric applications
IEICE Electronics Express, 2014 Asif Mirza +6 more
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A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure. [PDF]
Micromachines (Basel), 2016 Huang JQ, Li B, Chen W.
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