Results 141 to 150 of about 20,977 (202)

CMOS-Compatible Micro Photovoltaic Generator with Post-Processing Enhanced Optical Absorption. [PDF]

Micromachines (Basel)
Chen HW, Lee CY, Dai CL.
europepmc   +1 more source

Super-dense point clouds acquired by an ultralight 10 g solid-state single photon LiDAR. [PDF]

Nat Commun
Ohno T, Utagawa Y, Tanabe M, Sugiyama T, Matsumura T.   +4 more
europepmc   +1 more source

A review of commercial and laboratory-based microfluidic devices based on glass and/or silicon substrates. [PDF]

RSC Adv
Deb A, Nagesh G, Harrison T, Spicer D, Ting DS, Ahamed MJ.   +5 more
europepmc   +1 more source

Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review. [PDF]

Microsyst Nanoeng
Koh D, Jung Y, Kim J.
europepmc   +1 more source

Miniaturisation of Raman spectroscopy systems: from benchtop to backpocket.

Lab Chip
Hardy M, Kanade PP, Buchan E, Goldberg Oppenheimer P, McPolin CPT, Bowman RM.   +5 more
europepmc   +1 more source

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Advanced CMOS–MEMS Resonator Platform

IEEE Electron Device Letters, 2012
Deep-submicrometer-gap CMOS-MEMS “composite” resonators fabricated using 0.18- μm-1-poly-6-metal foundry CMOS technology have been demonstrated for the first time to substantially improve their electromechanical coupling coefficient, hence leading to a motional impedance of only 880 kΩ at 15.3 MHz.
Cheng-Syun Li, Li-Jen Hou, Sheng-Shian Li   +2 more
openaire   +3 more sources