Results 191 to 200 of about 20,977 (202)

MEMS-above CMOS and novel optical MEMS sensor concepts

2020
H.A.C. Tilmans, V. Rochus, R. Jansen, W.J. Westervelde, M. Mahmud-ul-hasan, S. Severi, B. Figeys, K. Lodewijks, S. Seema, X. Rottenberg   +9 more
openaire   +1 more source

Design and characterization of mechanically coupled CMOS-MEMS filters for channel-select applications

Sensors and Actuators A: Physical, 2014
Ming-Huang Li, Cheng-Syun Li, Sheng-Shian Li   +2 more
exaly  

A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High- $Q$ 22-MHz Polysilicon Clamped-Clamped Beam Resonators

IEEE Electron Device Letters, 2009
Jaume Verd, Arantxa Uranga, Gonzalo Murillo   +2 more
exaly  

Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology

Micromachines, 2015
Po-Jen Shih
exaly  

Ultrathin TiN Membranes as a Technology Platform for CMOS‐Integrated MEMS and BioMEMS Devices

Advanced Functional Materials, 2011
exaly  

Integrated Inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems

Sensors, 2007
Hidekuni Takao
exaly  

CMOS-SOI-MEMS Transistor for Uncooled IR Imaging

IEEE Transactions on Electron Devices, 2009
Yael Nemirovsky
exaly  

Piezoelectric aluminum nitride thin films for CMOS compatible MEMS: Sputter deposition and doping

Critical Reviews in Solid State and Materials Sciences
Rui M R Pinto, Sandeep, Nagaraja K K
exaly  

Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

IEEE Electron Device Letters, 2008
exaly  

A high precision SOI MEMS–CMOS ±4g piezoresistive accelerometer

Sensors and Actuators A: Physical, 2014
exaly