Results 191 to 200 of about 6,180 (208)
Some of the next articles are maybe not open access.

CMOS–MEMS resonators: From devices to applications

Microelectronic Engineering, 2015
A Uranga, J Verd, N Barniol
exaly  

CMOS-MEMS

2016
openaire   +1 more source

Advanced CMOS–MEMS Resonator Platform

IEEE Electron Device Letters, 2012
Cheng-Syun Li, Sheng-Shian Li
exaly  

Design and characterization of mechanically coupled CMOS-MEMS filters for channel-select applications

Sensors and Actuators A: Physical, 2014
Chao-Yu Chen   +2 more
exaly  

CMOS MEMS Fabrication Technologies

2012
Dimitrios Peroulis   +39 more
openaire   +1 more source

A 5.8-GHz VCO with CMOS-compatible MEMS inductors

Sensors and Actuators A: Physical, 2007
Sheng-Hsiang Tseng   +2 more
exaly  

CMOS MEMS Fabrication Technologies

2016
Hongwei Qu, Huikai Xie
openaire   +1 more source

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