Results 151 to 160 of about 2,164 (196)

A high frequency cMUT probe for ultrasound imaging of fingerprints

open access: yesSensors and Actuators A: Physical, 2011
Fingerprint imaging using ultrasound has been investigated for several years and has shown to be a valid alternative to optical scanners. Capacitive micro-machined ultrasound transducers (cMUT) is an emerging MEMS technology that can be profitably ...
N Lamberti   +2 more
exaly   +3 more sources
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Dual-electrode CMUT optimization for CMUTs with uniform and non-uniform membranes

2008 IEEE Ultrasonics Symposium, 2008
In this paper, we report optimization results on dual-electrode CMUTs with uniform and non-uniform membranes. The electromechanical coupling coefficient (k2) is both simulated and experimentally measured for conventional and dual-electrode CMUTs. The electromechanical coupling coefficient (k2) of 0.82 at 90% of collapse voltage as well as 136% 3dB one ...
Değertekin, F Levent   +3 more
openaire   +2 more sources

Fabrication of gap-optimized CMUT

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2002
A recently introduced set up of capacitive micromachined ultrasonic transducers (cMUT) combines a conductive membrane above a structured sacrificial layer. All previous approaches either require an additional metallic electrode or do not possess a structured sacrificial layer and, consequently, may make exact adjustment of the membrane dimensions ...
Oliver, Ahrens   +4 more
openaire   +2 more sources

Embedded sacrificial layers for CMUT fabrication [PDF]

open access: possible2015 IEEE SENSORS, 2015
Capacitive Micromachined Ultrasonic Transducers (CMUTs) are generally fabricated either by conventional sacrificial release process or by wafer bonding technique. In the former, sacrificial layers are patterned with deposited materials on the substrate.
Bozkurt, Ayhan   +3 more
openaire   +2 more sources

Characterization of cMUTs in rarefied gases

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2007
The performance of capacitive micromachined ultrasonic transducers (cMUTs) was investigated at low pressures in various gases such as air, carbon dioxide, and helium. The aim was to replicate the pressure conditions likely to meet on the surface of other planets such as Mars, where ultrasonic wind velocity measurements might be possible.
Lee A J, Davis   +2 more
openaire   +2 more sources

Grooved Backing Structure for CMUTs

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2013
Capacitive micromachined ultrasonic transducers (CMUTs) manufactured on silicon substrates need an acoustic backing to suppress substrate ringing when such transducers are in operation. The acoustic backing most often used for ultrasound transducers is a composite of epoxy and tungsten powder. To absorb the acoustic energy, the backing of a CMUT should
Kamal Raj, Chapagain, Arne, Rønnekleiv
openaire   +2 more sources

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