Results 181 to 190 of about 2,164 (196)
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Inkjet-printed CMUT humidity sensors with high sensitivity and low hysteresis
Sensors and Actuators B: Chemical, 2021Zhou Zheng +2 more
exaly
A Novel Method for cMUT fabrication
2003We present a novel surface micromachining process, where the top electrodes of the cMUTs (capacitive Micromachined Ultrasonic Transducer) are made-up of a combination of silicon nitride and porous polysilicon. This construction gives many advantages over the fabrication processes reported in the past. Our fabrication process contains an original method
Saarilahti, Jaakko +3 more
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Fabrication and characterization of polymer CMUTs
2023 37th Symposium on Microelectronics Technology and Devices (SBMicro), 2023Gustavo Marcati A. Alves +2 more
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A high-performance CMUT humidity sensor based on cellulose nanocrystal sensing film
Sensors and Actuators B: Chemical, 2020Zhou Zheng, John T W Yeow
exaly
CMUT-based resonant gas sensor array for VOC detection with low operating voltage
Sensors and Actuators B: Chemical, 2018Sangjun Park, Inug Yoon, Ji-Won Seo
exaly
Fabrication and Characterization of a Wideband Low-Frequency CMUT Array for Air-Coupled Imaging
IEEE Sensors Journal, 2020Hui Zhang +2 more
exaly
Capacitive micromachined ultrasonic transducer (CMUT) based micro viscosity sensor
Sensors and Actuators B: Chemical, 2016Lou Liang
exaly
Capacitive micromachined ultrasonic transducer (CMUT) as a chemical sensor for DMMP detection
Sensors and Actuators B: Chemical, 2011Kwan Kyu Park +2 more
exaly