Results 191 to 200 of about 260 (208)

Model-informed deep learning for computational lithography with partially coherent illumination

Optics Express, 2020
Gonzalo Arce, Xu Ma, Yihua Pan
exaly  

LithoBench: Benchmarking AI Computational Lithography for Semiconductor Manufacturing

Advances in Neural Information Processing Systems 36, 2023
Su Zheng, Haoyu Yang, Binwu Zhu, Bei Yu 0001, Martin D. F. Wong   +4 more
openaire   +2 more sources

Optical and EUV projection lithography: A computational view

Microelectronic Engineering, 2015
Andreas Erdmann, Tim Fühner, Dongbo Xu   +2 more
exaly  

Process optimization for next generation high-NA EUV patterning by computational lithography techniques

2023
Zac Levinson, Thuc Dam, Ulrich Klostermann   +2 more
exaly  

Modeling and Computational Lithography

2008
openaire   +1 more source

Streamlining Computational Lithography With Efficient Pattern Database

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
Su Zheng, Wenqian Zhao 0002, Shuyuan Sun, Fan Yang 0001, Bei Yu 0001, Martin D. F. Wong   +5 more
openaire   +1 more source

ML for Computational Lithography: Practical Recipes

Proceedings of the 30th Asia and South Pacific Design Automation Conference
openaire   +1 more source

Efficient source mask optimization method for reduction of computational lithography cycles and enhancement of process-window predictability

Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2015
Yayi Wei, Qingchen Cao, Zhiyang Song
exaly  

Review of computational lithography modeling: focusing on extending optical lithography and design-technology co-optimization

Advanced Optical Technologies, 2012
exaly  

Incorporating photomask shape uncertainty in computational lithography

Proceedings of SPIE, 2016
Lam Eym, Andreas Erdmann, Shiyuan Liu
exaly