Results 201 to 208 of about 260 (208)

Optimal feature vector design for computational lithography

2019
Xuelong Shi
exaly  

Aspherical Lens Design Using Computational Lithography

Precision Engineering, 2017
Yasuko Yanagida, Takeshi Hatsuzawa
exaly  

Computational Lithography for EUVL

openaire   +1 more source

Computational Lithography for Full Chip

openaire   +1 more source

Computational lithography with feature upsizing

2014
PARIKH ASHESH, HO CHI-CHIEN, SMELKO THOMAS JOHN   +2 more
openaire   +1 more source

Computational lithography: the new enabler of Moore's Law

Proceedings of SPIE, 2008
exaly  

Advanced computational lithography based on information theory

Xu Ma
exaly  

Computational lithography to overcome the challenges in memory devices

DTCO and Computational Patterning V
openaire   +1 more source