Results 151 to 158 of about 169 (158)

Modification of poly(styrene) thin films and enhancement of cryogenic plasma etching resistance by ruthenium tetroxide vapor staining

Polymer, 2015
Marylene Vayer, Mohamed Boufnichel, Rémi Dussart   +2 more
exaly  

Cryogenic Etching of Silicon: An Alternative Method for Fabrication of Vertical Microcantilever Master Molds

Journal of Microelectromechanical Systems, 2010
Scott T Retterer, Nickolay V Lavrik, John Wikswo   +2 more
exaly  

Pseudo‐Wet Plasma Mechanism Enabling High‐Throughput Dry Etching of SiO 2 by Cryogenic‐Assisted Surface Reactions

Small Methods
Shih-Nan Hsiao
exaly  

Application of the cryogenic etching for mold fabrication in Si substrates

2017
Yarekha, Dmitri, Halbwax, Mathieu, Belouchrani, N., Magnin, Vincent, Harari, Joseph, Vilcot, Jean-Pierre, Torralba, Encarnacion, Le Gall, Sylvain, Lachaume, Raphaël, Bastide, Stéphane   +9 more
openaire   +1 more source

Revolutionizing reactive ion etching: ion-enhanced surface autocatalytic reactions enabling ultra-high throughput using cryogenic hydrogen-fluoride plasma

Chemical Engineering Journal
Shih-Nan Hsiao, Kenji Ishikawa
exaly  

CRYOGENIC PLASMA ETCHING USING C2H2F2

STAFFORD NATHAN, NGUYEN PHONG, JENNINGS COLIN, BILTEK SCOTT   +3 more
openaire   +1 more source

Ion beam etching utilizing cryogenic wafer temperatures

2017
LILL THORSTEN, BERRY III IVAN L, RICCI ANTHONY   +2 more
openaire   +2 more sources

Cryogenic Plasma Etching Process Optimization Using a Wireless CryoTemp™ Metrology Wafer

exaly