Results 141 to 150 of about 169 (158)

Cryogenic etching for pattern transfer into silicon of Mix-and-Match structured resist layers

Microelectronic Engineering, 2020
Ivo Rangelow, Eberhard Manske, Laura Mohr-Weidenfeller   +2 more
exaly  

Cryogenic etching and halogens

Advanced Etch Technology and Process Integration for Nanopatterning XV
Mingmei Wang, Yichen Fan, Yuri Barsukov, Dongjun Wu, Thorsten Lill, Weitao Yang, Tanner Ozel   +6 more
openaire   +1 more source

Fabrication of nanoelectromechanical resonators using a cryogenic etching technique

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2006
N. Nelson-Fitzpatrick, K. Westra, P. Li, S. McColman, N. Wilding, S. Evoy   +5 more
openaire   +1 more source

Cryogenic Atomic Layer Etching of SiO 2

2017
N Holtzer, T Tillocher, P Lefaucheux, R Dussart   +3 more
openaire   +1 more source

The Investigation of CF3I For High-Aspect-Ratio Cryogenic Dielectric Etch

2023 China Semiconductor Technology International Conference (CSTIC), 2023
Jianqiu Hou, Vina Xu, Kai Zhang, Ziyang Wu   +3 more
openaire   +1 more source

Study of Schottky Diodes Based on an Array of Silicon Wires Obtained by Cryogenic Dry Etching

Technical Physics Letters, 2022
Ivan Morozov, Morozov I A, Uvarov A V
exaly  

Concurrent effects of wafer temperature and oxygen fraction on cryogenic silicon etching with SF6/O2 plasmas

Plasma Processes and Polymers, 2017
Violeta Georgieva, Annemie Bogaerts
exaly  

Cryogenic Etching of High Aspect Ratio 400-nm Pitch Silicon Gratings

Journal of Microelectromechanical Systems, 2016
Han Wen, Houxun Miao, Houxun Miao
exaly  

Cryogenic etching of n-type silicon with p+ doped walls with the TGZM process through the Al/Si eutectic alloy

Microelectronic Engineering, 2009
Rémi Dussart, P Ranson, P Lefaucheux
exaly  

Nanoindentation of crystalline silicon pillars fabricated by soft UV nanoimprint lithography and cryogenic deep reactive ion etching

Sensors and Actuators A: Physical, 2018
Erwin Peiner, Uwe Brand, Hutomo Suryo Wasisto   +2 more
exaly