Results 231 to 236 of about 17,122 (236)

Nanoindentation of crystalline silicon pillars fabricated by soft UV nanoimprint lithography and cryogenic deep reactive ion etching

Sensors and Actuators A: Physical, 2018
Gerry Hamdana, Min Xu, Tony Granz
exaly  

Damage Free Cryogenic Etching of a Porous Organosilica Ultralow-k Film

ECS Solid State Letters, 2012
L. Zhang, R. Ljazouli, P. Lefaucheux, T. Tillocher, R. Dussart, Y. A. Mankelevich, J.-F. de Marneffe, S. de Gendt, M. R. Baklanov   +8 more
openaire   +1 more source

Pseudo‐Wet Plasma Mechanism Enabling High‐Throughput Dry Etching of SiO 2 by Cryogenic‐Assisted Surface Reactions

Small Methods
Shih-Nan Hsiao, Makoto Sekine, Nikolay Britun   +2 more
exaly  

Revolutionizing reactive ion etching: ion-enhanced surface autocatalytic reactions enabling ultra-high throughput using cryogenic hydrogen-fluoride plasma

Chemical Engineering Journal
Shih-Nan Hsiao, Makoto Sekine, Kenji Ishikawa   +2 more
exaly  

Application of the cryogenic etching for mold fabrication in Si substrates

2017
Yarekha, Dmitri, Halbwax, Mathieu, Belouchrani, N., Magnin, Vincent, Harari, Joseph, Vilcot, Jean-Pierre, Torralba, Encarnacion, Le Gall, Sylvain, Lachaume, Raphaël, Bastide, Stéphane   +9 more
openaire   +1 more source

Cryogenic Plasma Etching Process Optimization Using a Wireless CryoTemp™ Metrology Wafer

exaly