Results 231 to 237 of about 2,906 (237)

Cryogenic Atomic Layer Etching of SiO 2

2017
N Holtzer, T Tillocher, P Lefaucheux, R Dussart   +3 more
openaire   +1 more source

Concurrent effects of wafer temperature and oxygen fraction on cryogenic silicon etching with SF6/O2 plasmas

Plasma Processes and Polymers, 2017
Stefan Tinck, T Tillocher, Violeta Georgieva   +2 more
exaly  

Nanoindentation of crystalline silicon pillars fabricated by soft UV nanoimprint lithography and cryogenic deep reactive ion etching

Sensors and Actuators A: Physical, 2018
Gerry Hamdana, Min Xu, Maik Bertke
exaly  

Pseudo‐Wet Plasma Mechanism Enabling High‐Throughput Dry Etching of SiO 2 by Cryogenic‐Assisted Surface Reactions

Small Methods
Shih-Nan Hsiao
exaly  

Revolutionizing reactive ion etching: ion-enhanced surface autocatalytic reactions enabling ultra-high throughput using cryogenic hydrogen-fluoride plasma

Chemical Engineering Journal
Shih-Nan Hsiao, Makoto Sekine, Kenji Ishikawa   +2 more
exaly  

Application of the cryogenic etching for mold fabrication in Si substrates

2017
Yarekha, Dmitri, Halbwax, Mathieu, Belouchrani, N., Magnin, Vincent, Harari, Joseph, Vilcot, Jean-Pierre, Torralba, Encarnacion, Le Gall, Sylvain, Lachaume, Raphaël, Bastide, Stéphane   +9 more
openaire   +1 more source

Cryogenic Plasma Etching Process Optimization Using a Wireless CryoTemp™ Metrology Wafer

exaly