Results 201 to 204 of about 19,615 (204)

Deep Vertical Etching of Silicon Wafers Using a Hydrogenation-Assisted Reactive Ion Etching

Journal of Microelectromechanical Systems, 2007
exaly  

Maximum achievable aspect ratio in deep reactive ion etching of silicon due to aspect ratio dependent transport and the microloading effect

, 2005
J. Yeom, Yan Wu, J. C. Selby, M. Shannon
semanticscholar   +1 more source

Deep Reactive Ion Etching

2015
Sami Franssila, Franz Laermer, Lauri Sainiemi   +2 more
exaly  

Deep reactive ion etching of borosilicate glass using an anodically bonded silicon wafer as an etching mask

, 2006
T. Akashi, Y. Yoshimura
semanticscholar   +1 more source