Results 191 to 200 of about 19,615 (204)

Wafer Bevel Protection During Deep Reactive Ion Etching

IEEE Transactions on Semiconductor Manufacturing, 2011
Efrain Altamirano-Sanchez, Jaume Roig, Koen van Wichelen   +2 more
exaly  

Superhydrophobic surfaces by dynamic nanomasking and deep reactive ion etching

Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems, 2007
Min Zou
exaly  

Deep reactive ion etching of Pyrex glass using SF6 plasma

, 2001
Xing-Hua Li, T. Abe, M. Esashi
semanticscholar   +1 more source

Analysis of sidewall quality in through-wafer deep reactive-ion etching

Microelectronic Engineering, 2004
exaly   +2 more sources

A method to evade silicon backside damage in deep reactive ion etching for anodically bonded glass–silicon structures

Sensors and Actuators A: Physical, 2001
K Tsutsumi
exaly  

Advanced deep reactive-ion etching technology for hollow microneedles for transdermal blood sampling and drug delivery

IET Nanobiotechnology, 2013
Owen Guy, Yufei Liu, Huma Ashraf
exaly  

Reduction of isotropic etch for silicon nanowires created by metal assisted deep reactive ion etching

International Journal of Nanotechnology, 2018
Chien Mau DANG, Bui Thanh Tung
exaly  

Deep reactive ion etching as a tool for nanostructure fabrication

, 2009
Y. Fu, A. Colli, A. Fasoli, Ji-Kui Luo, A. Flewitt, A. Ferrari, W. Milne   +6 more
semanticscholar   +1 more source

Deep reactive ion etching of in situ boron doped LPCVD GeSi using SF and O plasma

Microelectronic Engineering, 2013
Jurriaan Schmitz
exaly  

Terahertz vacuum electronic circuits fabricated by UV lithographic molding and deep reactive ion etching

, 2009
Y. Shin, L. Barnett, D. Gamzina, N. Luhmann, M. Field, R. Borwick   +5 more
semanticscholar   +1 more source