In this work, we propose a CMP method for InP using NH4PF₆, which hydrolyzes under In3+ catalysis to form reactive species. These convert InP into low‐binding‐energy fluorides, facilitating removal and dissolution. The process delivers high material removal rates, smooth surfaces, and fluorine passivation that lowers defect density and improves ...
Shigong Fu +5 more
wiley +1 more source
Wet etching of (-102) β-Ga<sub>2</sub>O<sub>3</sub> with tetramethylammonium hydroxide (TMAH). [PDF]
Oshima T.
europepmc +1 more source
Advanced Dental Composite Technology via Bisilanized Dual‐Action Nanofillers for Biofilm Control
A multimodal research strategy has led to the development of an innovative resin‐based composite (RBC) with dual antibacterial action. The S_CM‐RBC formula showed strong antibiofilm activity, excellent mechanical strength, and biosafety. It effectively controlled oral bacteria in prevention of caries recurrence, and maintained pulp health in a rat ...
Chenmin Yao +11 more
wiley +1 more source
Optimization Method for the Synergistic Control of DRIE Process Parameters on Sidewall Steepness and Aspect Ratio. [PDF]
Wang D +8 more
europepmc +1 more source
A CCM‐based architectural strategy is introduced for high‐temperature PEM fuel cells, enabling MPL‐free carbon paper gas diffusion layers via decal‐transfer processing. By co‐engineering the CCM, GDL, and a G‐foam flow field, oxygen transport is enhanced while phosphoric‐acid leakage is suppressed, resulting in high power density and stable operation ...
Seongmin Cho +6 more
wiley +1 more source
Advances in silicon carbide pressure sensors for high-temperature extreme environment sensing. [PDF]
Wu C +12 more
europepmc +1 more source
Solid Ethanol as a Renewable, Low‐Toxicity, Electron‐Beam Direct Write, and Biomedical Material
3D ice lithography (3DIL) enables the fabrication of intricate submicrometer objects using ethanol as a renewable starting material. This study combines process optimization, structural and material analysis, and biomedical applications, from cell culture scaffolds to the patterning of neurostimulation electrodes, demonstrating performance in both in ...
Bruno Perdigão +16 more
wiley +1 more source
Atomic Layer Etching of Nickel Using N<sub>2</sub>/H<sub>2</sub> Plasma Exposure and Hexafluoroacetylacetone. [PDF]
Ali AM +7 more
europepmc +1 more source
Acoustic plasmons in Ti3C2Tx MXene strongly compress infrared electromagnetic fields and enhance light–matter interactions at the nanoscale. This platform couples broadband plasmon excitations with molecular vibrations, enabling simultaneous sensing of high‐ and low‐frequency vibrational modes in ultrathin PMMA and graphene oxide films, and extending ...
Changhoon Park +7 more
wiley +1 more source
Frequency-angle decoupling design for grid-etched piezoelectric MEMS cantilevers and its application to quasi-static micromirrors. [PDF]
Xue W +11 more
europepmc +1 more source

