Results 181 to 190 of about 19,615 (204)

Ultrahigh Resolution Titanium Deep Reactive Ion Etching.

ACS Applied Materials and Interfaces, 2017
Bryan W. K. Woo, Shannon C. Gott, Ryan A. Peck, D. Yan, Mathias W. Rommelfanger, Masaru P. Rao   +5 more
semanticscholar   +1 more source

Transparent, superhydrophobic, and wear-resistant surfaces using deep reactive ion etching on PDMS substrates.

Journal of Colloid and Interface Science, 2016
Daniel Ebert, B. Bhushan
semanticscholar   +1 more source

Deep reactive ion etching as a tool for nanostructure fabrication Available to Purchase

Journal of Vacuum Science & Technology B, 2009
Richard Fu, Andrea C. Ferrari, Andrew J. Flewitt   +2 more
exaly  

Fabrication and characterization of a tungsten microneedle array based on deep reactive ion etching technology

, 2016
Sheng-Li Ma, Yanming Xia, Yao-qi Wang, Kuili Ren, Rongfeng Luo, Lu Song, Xian Chen, Jing Chen, Yufeng Jin   +8 more
semanticscholar   +1 more source

Superhydrophobic silicon surfaces with micro–nano hierarchical structures deep reactive ion etching and galvanic etching

Journal of Colloid and Interface Science, 2011
Yang He, Weizheng Yuan, Chengyu Jiang
exaly  

Laser desorption ionization (LDI) silicon nanopost array chips fabricated using deep UV projection lithography and deep reactive ion etching

, 2015
N. Morris, Heather Anderson, B. Thibeault, A. Vertes, M. Powell, T. Razunguzwa   +5 more
semanticscholar   +1 more source

Formation mechanism of multi-functional black silicon based on optimized deep reactive ion etching technique with SF6/C4F8

, 2015
Fu-Yun Zhu, Xiao-Sheng Zhang, Haixia Zhang   +2 more
semanticscholar   +1 more source

Deep reactive ion etching of alumina titanium carbide using chlorine-based plasma

, 2016
C. Pakpum, N. Pussadee
semanticscholar   +1 more source

Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures

Microelectronics Journal, 2005
F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, T. Bourouina   +6 more
semanticscholar   +1 more source

Accelerated Publication: Deep reactive ion etching of sub-micrometer trenches with ultra high aspect ratio

, 2014
J. Parasuraman, A. Summanwar, F. Marty, P. Basset, D. Angelescu, T. Bourouina   +5 more
semanticscholar   +1 more source