Results 161 to 170 of about 2,020 (185)
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DUV Lithography
2012 Biana Godin, Elka Touitou, Rajaram Krishnan, Michael J. Heller, Nicolas G. Green, Hossein Nili, David J. Bakewell, Didi Xu, Arunkumar Subramanian, Lixin Dong, Bradley J. Nelson, Yi Zhang, Rüdiger Berger, Hans-Jürgen Butt, Seong H. Kim, Nicolas Lafitte, Yassine Haddab, Yann Gorrec, Momoko Kumemura, Laurent Jalabert, Christophe Yamahata, Nicolas Chaillet, Dominique Collard, Hiroyuki Fujita, Yabing Qi, Avinash P. Nayak, M. Saif Islam, V. J. Logeeswaran, Garry J. Bordonaro, Vladimir Gubala, Thomas Nowotny, Pablo Varona +31 moreopenaire +1 more sourceDUV Photolithography and Materials
2012 Biana Godin, Elka Touitou, Rajaram Krishnan, Michael J. Heller, Nicolas G. Green, Hossein Nili, David J. Bakewell, Didi Xu, Arunkumar Subramanian, Lixin Dong, Bradley J. Nelson, Yi Zhang, Rüdiger Berger, Hans-Jürgen Butt, Seong H. Kim, Nicolas Lafitte, Yassine Haddab, Yann Gorrec, Momoko Kumemura, Laurent Jalabert, Christophe Yamahata, Nicolas Chaillet, Dominique Collard, Hiroyuki Fujita, Yabing Qi, Avinash P. Nayak, M. Saif Islam, V. J. Logeeswaran, Garry J. Bordonaro, Vladimir Gubala, Thomas Nowotny, Pablo Varona +31 moreopenaire +1 more source