Results 171 to 180 of about 2,020 (185)
Some of the next articles are maybe not open access.

Development of a Reflective 193-nm DUV Microscope System for Defect Inspection of Large Optical Surfaces

Applied Sciences (Switzerland), 2019
Hong-Seung Kim   +2 more
exaly  

Current induced degradation study on state of the art DUV LEDs

Microelectronics Reliability, 2018
Nicola Trivellin   +2 more
exaly  

Practical Use and Calculation of CCT and Duv

LEUKOS - Journal of Illuminating Engineering Society of North America, 2014
exaly  

Photo-electron chemistry of photoresist outgassing upon DUV, VUV, EUV, and BEUV irradiation

Journal of Photochemistry and Photobiology A: Chemistry, 2018
Chen-Yu Yeh
exaly  

DUV/VUV All-Solid-State Lasers: Twenty Years of Progress and the Future

IEEE Journal of Selected Topics in Quantum Electronics, 2018
Qin-Jun Peng   +2 more
exaly  

Improved DUV multilayer resist process

Microelectronics Reliability, 1986
openaire   +1 more source

DUV lithography for nanopattern surfaces

2010
Dirani, Ali   +4 more
openaire   +1 more source

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