Results 1 to 10 of about 81,648 (296)
Room Temperature Direct Electron Beam Lithography in a Condensed Copper Carboxylate [PDF]
Micromachines, 2021 High-resolution metallic nanostructures can be fabricated with multistep processes, such as electron beam lithography or ice lithography. The gas-assisted direct-write technique known as focused electron beam induced deposition (FEBID) is more versatile ...
Luisa Berger +5 more
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Negative-tone molecular glass photoresist for high-resolution electron beam lithography [PDF]
Royal Society Open Science, 2021 A low molecular weight organic compound containing bis-phenol A backbone (BPA-6OH) is reported as a negative-tone photoresist. This material has a high glass transition temperature and excellent thermal stability.
Yafei Wang +5 more
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In Situ Study of the Impact of Aberration-Corrected Electron-Beam Lithography on the Electronic Transport of Suspended Graphene Devices [PDF]
Nanomaterials, 2020 The implementation of aberration-corrected electron beam lithography (AC-EBL) in a 200 keV scanning transmission electron microscope (STEM) is a novel technique that could be used for the fabrication of quantum devices based on 2D atomic crystals with ...
Naomi Mizuno, Fernando Camino, Xu Du
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Macrophage-compatible magnetic achiral nanorobots fabricated by electron beam lithography [PDF]
Scientific Reports, 2022 With the development and progress of nanotechnology, the prospect of using nanorobots to achieve targeted drug delivery is becoming possible. Although nanorobots can potentially improve nano-drug delivery systems, there remains a significant challenge to
Teng Jiang +3 more
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Electron beam lithography on nonplanar and irregular surfaces [PDF]
Microsystems & NanoengineeringE-beam lithography is a powerful tool for generating nanostructures and fabricating nanodevices with fine features approaching a few nanometers in size.
Chenxu Zhu +4 more
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Research on the application of thermal field emission gun in electron beam lithography
Dianzi Jishu Yingyong, 2022 The classification and characteristics of electron gun are introduced, with emphasis on the principle, structure and characteristics of thermal field emission gun and its application in electron beam lithography machine. The relationship between the beam
Hao Xiaoliang +6 more
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Gold Ion Beam Milled Gold Zero-Mode Waveguides
Nanomaterials, 2022 Zero-mode waveguides (ZMWs) are widely used in single molecule fluorescence microscopy for their enhancement of emitted light and the ability to study samples at physiological concentrations.
Troy C. Messina +4 more
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80 K cryogenic stage for ice lithography
Micro and Nano Engineering, 2022 We present a cryogenic system design and development for ice lithography. The cryo-stage is designed with embedded channels to allow direct liquid nitrogen flow, enabling fast cryogenic cooling, and low sample temperature.
Rubaiyet I. Haque +4 more
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Materials for Quantum Technology, 2023 In this Perspective article, we evaluate the current state of research on the use of focused electron and ion beams to directly fabricate nanoscale superconducting devices with application in quantum technologies.
José María De Teresa
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Nanomaterials, 2022 Recent developments in nanoprinting using focused electron beams have created a need to develop analysis methods for the products of electron-induced fragmentation of different metalorganic compounds.
Jakub Jurczyk +8 more
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