Results 241 to 250 of about 6,909 (302)

Angled electrode comb drives for enhanced actuator in silicon photonic applications. [PDF]

Microsyst Nanoeng
Fasihanifard M, Packirisamy M.
europepmc   +1 more source

A multi-functional MEMS resonator for simultaneously dual-mode physical sensing and ppb-level timing. [PDF]

Microsyst Nanoeng
Xu J, Xi J, Wang C, Kraft M, Liu H, Martins RP, Mak PI, Wang Y.   +7 more
europepmc   +1 more source

Electrically responsive multilayer soft actuators using a solvent-free high dielectric permittivity polysiloxane ink.

Mater Horiz
Wolf J, Danner PM, Raman Verkatesan T, Lupu VR, Opris DM.   +4 more
europepmc   +1 more source

Conductive Fibers of Chitosan/DNA Interfacial Polyelectrolyte Complexation Incorporating Carbon Nanotubes. [PDF]

ACS Appl Mater Interfaces
Utagawa Y, Takinoue M, Nomura SM, Sato Y, Onoe H, Fujie T, Nakazawa H, Umetsu M, Abe H, Shiku H, Ino K.   +10 more
europepmc   +1 more source

Microswitch with Mixed Piezoelectric and Electrostatic Actuation

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 2007
In this article, a new concept of microswitch is investigated with the objective to decrease the actuation voltage. It consists in a component with two kinds of actuation mechanisms: piezoelectric actuation and electrostatic actuation. The structures were realized with a technology compatible with CMOS technology.
Chapuis, Francois, Defay, Emmanuel, Casset, Fabrice, Manceau, Jean-François, Bastien, Francois, Aïd, Marc   +5 more
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Stability of Electrostatic Actuation of MEMS

Physica Scripta, 2004
The increased electrostatic stability of MEMS sensors enables new application areas for the sensors, and decreases the manufacturing costs of existing products. Especially in the applications where the MEMS component is operated under bias voltage close to the pull-in point, the undesired instability phenomenon becomes a major source of inaccuracy.
Kärkkäinen, Anu, Oja, Aarne, Kyynäräinen, Jukka, Kuisma, Heikki, Seppä, Heikki   +4 more
openaire   +2 more sources

Electrostatically Driven Nanoballoon Actuator

Nano Letters, 2016
We demonstrate an inflatable nanoballoon actuator based on geometrical transitions between the inflated (cylindrical) and collapsed (flattened) forms of a carbon nanotube. In situ transmission electron microscopy experiments employing a nanoelectromechanical manipulator show that a collapsed carbon nanotube can be reinflated by electrically charging ...
Hamid Reza, Barzegar, Aiming, Yan, Sinisa, Coh, Eduardo, Gracia-Espino, Gabriel, Dunn, Thomas, Wågberg, Steven G, Louie, Marvin L, Cohen, Alex, Zettl   +8 more
openaire   +2 more sources

Study of micro-actuator with electrostatic actuating

SPIE Proceedings, 2006
The micro-actuator with the torsion beam and the cantilever beam on silicon is designed and analyzed, which is actuated by electrostatic force. Based on the torsion dynamics theory, the technique and relative formula are presented for analyzing the actuating voltage and the switching time, on which the effect of the air squeeze film damping is already ...
Dong-Ming Sun, Wei Dong, Guo-Dong Wang, Cai-Xia Liu, Wei-You Chen   +4 more
openaire   +1 more source

Anisotropic electrostatic actuation

Journal of Physics D: Applied Physics, 2009
We examine the theoretical basis for the enhancement of classical, dielectric actuation by first imposing an elongation ('pre-strain') in one of the two directions in the plane of the working elastomeric filling between flexible electrodes. Such anisotropic actuation has been shown experimentally to be effective in delivering more mechanical work from ...
D Corbett, M Warner
openaire   +1 more source