Results 251 to 260 of about 6,909 (302)

Electrostatic micromechanic actuators

Journal of Micromechanics and Microengineering, 1992
Actuators based on the electrostatic principle are one of the most important in microsystem technology. In the future, actuators of 1D or 2D type will be necessary in many fields, especially in optical deflection and scanning systems. They will solve many different problems: device fabrication processes, surface-deformation, reflection factors ...
U Breng, T Gessner, C Kaufmann, R Kiehnscherf, J Markert   +4 more
openaire   +1 more source

The modeling of electrostatic forces in small electrostatic actuators

IEEE Technical Digest on Solid-State Sensor and Actuator Workshop, 2003
The basic elements of electrostatic devices (conductors, dielectrics, insulators, electrets, and ferroelectrics) are reviewed and it is shown that the modeling of electrostatic forces is a very different, and in many ways a more difficult, undertaking than the modeling of magnetic interactions; the difference between the real-world behavior of ...
R.H. Price, J.E. Wood, S.C. Jacobsen
openaire   +1 more source

Nanoscale electrostatic actuators in liquid electrolytes

Journal of Colloid and Interface Science, 2006
Equilibrium and energy analyses were performed for an electrostatic actuator consisting of two plane parallel electrodes, operated using DC voltages, separated by a liquid electrolyte. One electrode is fixed, and the other electrode is connected to a spring and is free to move.
James G, Boyd, Doyoung, Kim
openaire   +2 more sources

On electrostatically actuated microsensors

SPIE Proceedings, 2010
Mass deposition changes resonance frequencies of structures. Resonator sensitivity, defined as a fraction of change in frequency per unit deposited mass, is found for microcantilever sensors electrostatically actuated to include fringe and Casimir effects. These actuation forces produce nonlinear parametric oscillations.
Dumitru I. Caruntu, Martin W. Knecht
openaire   +1 more source

Fabrication of an Electrothermally Actuated Electrostatic Microgripper

International Journal of Nonlinear Sciences and Numerical Simulation, 2002
A novel electrostatic microgripper, which can handle micro objects with the electrostatic force, is designed and fabricated. It consists of gripping part with one inner and two outer electrodes, and releasing part with an electrothermal actuator. It grips micro objects using electric field generated between the electrodes, and releases them using the ...
Lee, S.H., Lee, K.-C., Lee, S.S. Lee, Seung Seob, Oh, H.-S.   +3 more
openaire   +1 more source

Electrostatic parallelogram actuators

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, 2002
Surface micromachined actuators composed of polysilicon, parallelogram flexible supports are described. The parallelogram actuators transform both the direction and the magnitude of the attractive, electrostatic force developed between the drive electrodes.
N. Takeshima, K.J. Gabriel, M. Ozaki, J. Takahashi, H. Horiguchi, H. Fujita   +5 more
openaire   +1 more source

Repetitive Control for an Electrostatic Microbridge Actuator

Design Engineering, Parts A and B, 2005
Electrostatic microactuators are used extensively in MEMS sensors, RF switches, and microfluidic pumps. Due to high bandwidth operation, however, reduction of residual vibration using feedback control is diffcult to implement. This paper designs, proves stability, and simulates a feedforward repetitive controller for an electrostatic microbridge ...
Zhao, Haiyu, Rahn, Christopher D., CANBOLAT, HÜSEYİN   +2 more
openaire   +2 more sources

An on-line calibration hydrophone with electrostatic actuator

Science China Information Sciences, 2016
On-line sensitivity calibration of hydrophones is of considerable significance for their practical application. An on-line method using an electrostatic actuator is proposed in this paper for a radially polarized cylindrical piezoelectric hydrophone. The theory of this calibration method is analyzed.
Jingbin Wang, Zhaoli Yan, Bin Chen, Xiaobin Cheng   +3 more
openaire   +1 more source

Surface-normal electrostatic/pneumatic actuator

[1992] Proceedings IEEE Micro Electro Mechanical Systems, 1992
An electrostatically driven, pneumatic actuator able to generate surface-normal deflections is described. Two sealed, air-filled, concentric chambers that share a membrane and are connected by channels make up the actuator. The portion of the membrane suspended over the outer chamber serves as the movable electrode plate while the conducting substrate ...
Gabriel, Kaigham, Tabata, O, Shimaoka, K, Sugiyama, S, Fujita, H   +4 more
openaire   +1 more source

Electrostatically actuated window blinds

Journal of Electrostatics, 2001
Abstract An electrostatic method for actuating window blinds was recently developed by the authors in work that is documented elsewhere. The method was developed in an experimental effort without the help of predictive tools. This paper examines that problem in more detail and formulates an electrostatic model for these systems. The complexity of the
Scott F. Kiefer, Larry M. Silverberg, Manoel L. Gonzalez   +2 more
openaire   +1 more source