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Dimpled electrostatic MEMS actuators
Journal of Applied Physics, 2019We present electrostatic Micro-Electromechanical System actuators equipped with dimples and contact pads. The introduction of dimples and contact pads is shown to prevent stiction between the actuator and bottom electrodes and minimize dielectric charging and to eliminate multi-valuedness in the response.
A. Alneamy +5 more
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Dielectric Nanofluids for Electrostatic Machines & Actuators
2019 IEEE Industry Applications Society Annual Meeting, 2019Dielectric suspensions consisting of sterically coated, nano-scale barium titanium particles in the organic ester, isoamyl isovalerate, were developed to enhance the field forces in electrostatic machinery. The relative permittivity and conductivity of the suspensions were measured experimentally, as was the electrostatic force developed upon ...
Kevin J. Frankforter +2 more
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Modeling Electrostatic MEMS Actuator
2021 28th IEEE International Conference on Electronics, Circuits, and Systems (ICECS), 2021Zdenek Kolka +3 more
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Micromechanical relay with electrostatic actuation
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), 2002Three variants of electrostatically driven microrelays are reported. The concepts of these microrelays are a cantilever beam, a fixed-fixed beam and a torsion beam with a double contact configuration. Because of the complete fabrication by surface micromachining technology, there is no need for a chip bonding process.
I. Schiele +3 more
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Electrostatically Actuated Compliant Microvalve
Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B, 2012We present an electrostatically operated normally opened microvalve for gas flow control. The valve is made of thermoplastic materials and uses a new fabrication method. The voltage required to close the 0.9 mm wide microvalve was ∼350 V for fluid (air) pressure ∼1kPa.
Tatjana Dankovic, Alan Feinerman
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Electrostatically actuated micromechanical switches
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1997Micromechanical switches and relays realized by a simple surface micromachining process are presented. The devices use a nickel cantilever beam and gold-to-gold electrical contact, and are electrostatically actuated. They have lifetimes exceeding 109 cycles, and a current handling capability of 150 mA.
S. Majumder +2 more
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MICROPUMP WITH ELECTROSTATIC ACTUATION
2016A micropump includes: a pumping chamber (20), between a first semiconductor substrate (7) and a second semiconductor substrate (8) bonded to each other; an inlet valve (21), having an inlet shutter element (27) between an inlet passage (18) and the pumping chamber (20); an outlet valve (22), having an outlet shutter element (33) between the pumping ...
R. Ardito +3 more
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Section 4: Electrostatic Actuators
2009This chapter contains sections titled: The Principle of an Electrostatic Linear Actuator Manufactured by Silicon Micromachining Design Considerations for a Practical Electrostatic Micro-Motor SCOFSS: A Small Cantilevered Optical Fiber Servo System Microactuators for Aligning Optical Fibers Large Displacement Linear Actuator
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Rapid and spatially programmed electrostatic actuation of anisotropic polymers
Chemical Engineering Journal, 2023Moon-Young Choi +2 more
exaly
Position Sensing of Electrostatic MEMS Actuator
2022 29th IEEE International Conference on Electronics, Circuits and Systems (ICECS), 2022Zdenek Kolka +2 more
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