Results 1 to 10 of about 88,368 (276)

Suppression of stacking fault expansion in a 4H-SiC epitaxial layer by proton irradiation [PDF]

open access: yesScientific Reports, 2022
SiC bipolar degradation, which is caused by stacking fault expansion from basal plane dislocations in a SiC epitaxial layer or near the interface between the epitaxial layer and the substrate, is one of the critical problems inhibiting widespread usage ...
Shunta Harada   +3 more
doaj   +2 more sources

Investigation on Step-Bunched Homoepitaxial Layers Grown on On-Axis 4H-SiC Substrates via Molten KOH Etching

open access: yesCrystals, 2022
Wafer-scale on-axis 4H-SiC epitaxial layers with very low roughness were obtained in this study. By performing carbon-rich hydrogen etching and epitaxial growth of the epitaxial layer at different temperatures, local mirror regions (LMRs) with root mean ...
Jiulong Wang   +6 more
doaj   +1 more source

Layer-by-layer epitaxy of multi-layer MoS2 wafers

open access: yesNational Science Review, 2022
Abstract The 2D semiconductor of MoS2 has great potential for advanced electronics technologies beyond silicon. So far, high-quality monolayer MoS2 wafers have been available and various demonstrations from individual transistors to integrated circuits have also been shown.
Wang, Qinqin   +22 more
openaire   +4 more sources

Enhanced crystalline quality of non-polar a-plane AlGaN epitaxial film grown with Al-composition-graded AlGaN intermediate layer

open access: yesMaterials Research Express, 2021
The non-polar a -AlGaN epitaxial film was successfully grown on the semi-polar r- sapphire substrate by metal-organic chemical vapor deposition technique.
Abbas Nasir   +5 more
doaj   +1 more source

Magnetic anisotropy and Dzyaloshinskii–Moriya interaction of Pd/Co/Ta thin films

open access: yesSt. Petersburg Polytechnical University Journal: Physics and Mathematics, 2022
In this work, we experimentally studied the structure and magnetic properties of epitaxially grown ultrathin Pd/Co/Ta films. We have studied the effect of Ta on the structural and magnetic properties of Pd/Co epitaxial films. The deposition of a Ta layer
Kuznetsova Mariya   +6 more
doaj   +1 more source

A New Split Gate Resurf Stepped Oxide UMOSFET Structure with High Doped Epitaxial Layer for Improving Figure of Merit (FOM)

open access: yesApplied Sciences, 2020
The split gate resurf stepped oxide with highly doped epitaxial layer (HDSGRSO) UMOSFET has been proposed. The epitaxial layer of HDSGRSO u-shape metal oxide semiconductor field effect transistor (UMOSFET) has been divided into three parts: the upper ...
Runze Chen   +4 more
doaj   +1 more source

Microstructure and mechanical properties of laser-assisted epitaxial growth of nickel-based single crystal superalloys

open access: yesJournal of Materials Research and Technology, 2023
The effects of process parameters on the microstructures and properties of the laser-assisted epitaxial growth layer are of great significance for the repair of nickel-based single-crystal blades. This work investigated the microstructures and properties
Jinjun Xu   +7 more
doaj   +1 more source

Depth Profiling of Ion-Implanted 4H–SiC Using Confocal Raman Spectroscopy

open access: yesCrystals, 2020
For silicon carbide (SiC) processed by ion-implantation, dedicated test structure fabrication or destructive sample processing on test wafers are usually required to obtain depth profiles of electrical characteristics such as carrier concentration.
Ying Song   +6 more
doaj   +1 more source

Molecular layer epitaxy

open access: yesThin Solid Films, 1986
Abstract Molecular layer epitaxy (MLE) of GaAs related compounds and Si with SiO 2 deposition has been developed to realize the tera-hertz operating devices. At sufficiently low process temperature, lower than in the conventional growth method, device quality epitaxial layers were achieved by MLE.
Jun-ichi NISHIZAWA, Toru KURABAYASHI
openaire   +2 more sources

Deep-level traps in lightly Si-doped n-GaN on free-standing m-oriented GaN substrates

open access: yesAIP Advances, 2018
In this study, we investigated the deep-level traps in Si-doped GaN epitaxial layers by metal-organic chemical vapor deposition on c-oriented and m-oriented free-standing GaN substrates.
H. Yamada   +4 more
doaj   +1 more source

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