Prospects and Trends in Biomedical Microelectromechanical Systems (MEMS) Devices: A Review. [PDF]
Welburn L +3 more
europepmc +1 more source
Origami-inspired reprogrammable microactuator system. [PDF]
Gottwald V +8 more
europepmc +1 more source
The route to microstructures with optical quality glass surfaces by fs laser ablation. [PDF]
Schrödter D +3 more
europepmc +1 more source
Wafer-scale integration of photonic integrated circuits and atomic vapor cells. [PDF]
Grosman A +4 more
europepmc +1 more source
Microfabrication of ceramics by laser-assisted etching using an Nd: YAG laser and KOH solution.
Kunio Koyabu, Junji Watanabe
openalex +2 more sources
Quasi-anisotropic wet etching of glass creates inclined microstructures for advanced optical and MEMS devices. [PDF]
Yu J +9 more
europepmc +1 more source
Tapered Pillar Design for High-Precision Force Readout in Miniaturized Engineered Heart Tissues From Human Pluripotent Stem Cells. [PDF]
Dostanić M +9 more
europepmc +1 more source
Scalable nanopatterning of organic light-emitting diodes beyond the diffraction limit. [PDF]
Marcato T +9 more
europepmc +1 more source

