Results 161 to 170 of about 1,385 (209)
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Impedance of DC-bias-controlled composite FBARs
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2013A closed-form analytic formula is derived for composite resonators consisting of two layers of paraelectricphase ferroelectrics. It is used to analyze the properties of these resonators. Under an applied dc electric field, the layers exhibit an induced piezoelectric effect.
Spartak, Gevorgian, Andrei, Vorobiev
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Experimental study of phase noise in FBAR resonators
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2006Phase noise of micromachined bulk acoustic wave resonators is investigated. A measurement bench, able to characterize the phase noise of a single resonator on-wafer, is set up. The experimental data demonstrate the existence of a 1/f phase noise component, the amplitude of which is strongly dependent on the resonator geometry.
Sébastien, Gribaldo +3 more
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2013
In this chapter, the basic design features of intrinsically tuneable FBARs are considered focusing on the Bragg reflectors for the solidly mounted resonators. Effects of the electrodes and other layers on the tuneable performance of the FBARs including tuneability, Q-factor, and electromechanical coupling coefficient are also addressed.
Spartak Gevorgian +2 more
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In this chapter, the basic design features of intrinsically tuneable FBARs are considered focusing on the Bragg reflectors for the solidly mounted resonators. Effects of the electrodes and other layers on the tuneable performance of the FBARs including tuneability, Q-factor, and electromechanical coupling coefficient are also addressed.
Spartak Gevorgian +2 more
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Positioning FBAR technology in the frequency and timing domain
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2012This paper focuses on the technical differentiation of film bulk acoustic resonator (FBAR) technology from other mechanical resonator technologies for timing applications. The paper will touch on a recent modification of FBARs, the zero-drift resonator (ZDR), that is temperature compensated.
Rich, Ruby +6 more
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The FBAR with Membrane Structure
2012The FBAR has two kinds of structure which are membrane structure and Bragg reflector structure. Both the membrane structure and the Bragg reflector structure form a reflector interface of acoustic wave to the piezoelectric film. In this chapter, we discuss the first structure of FBAR called membrane structure.
Yafei Zhang, Da Chen
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Simulation and Analysis of the Temperature-Compensated FBAR
Applied Mechanics and Materials, 2015The property of temperature-frequency drift has an effect on the passband ripples, center frequency and insertion loss of FBAR filters, reducing the reliability of its electrical application. A temperature-frequency drift simulation of a typical Mo/AlN/Mo FBAR is achieved by means of finite element analysis software ANSYS, the simulated temperature ...
Bin Zhou, Yang Gao, Yi He, Wan Jing He
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Unbalanced device comprised of FBAR resonators
2012 IEEE International Ultrasonics Symposium, 2012A splitbar is comprised of two identical thin film bulk acoustic (FEAR) resonators, whose electrodes are cross connected such that the C-axes of the piezoelectric films are parallel/anti-parallel to an applied electric field stimulus. The RF response of a splitbar is near identical to that of a single resonator, but unlike the single resonator, because
David A. Feld +4 more
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The Applications of FBAR in RF Filters
2012The FBAR filter have a good application prospect , which can work at 1–20 GHz with high Q-factor, small size, low loss, preferable temperature stability and processing technical compatible with the CMOS IC. The topology of the FBAR filters includes trapezoidal type, bridge type and mixed type.
Yafei Zhang, Da Chen
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MEMS For Wireless: FBAR and LiMMS
Proceedings of the Twenty Third National Radio Science Conference (NRSC'2006), 2006This paper describes technology of micro-electro-mechanical systems (MEMS) in the field of mobile handsets, which uses the single-mode CDMA product of 1800-1900 MHz range. In order to gain the market penetration, the HP Labs uses the FBAR project, where it reduces the size and weight of the RF resonators, filters and duplexers. Thus, the brief analysis
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Novel flexible FBAR on PET substrate
2014 IEEE International Conference on Electron Devices and Solid-State Circuits, 2014A novel flexible Film Bulk Acoustic Wave Resonators (FBARs) based on ZnO/PET structure was fabricated without back-etch. The PET layer is applied as acoustic reflector and substrate of FBAR. It has 1.14GHz parallel resonant frequency, 1.229GHz series resonant frequency and about 150 Q factors.
N.N. Hu +5 more
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