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Circuit Applications of Tuneable FBARs
2013This chapter looks at the circuit applications of intrinsically and extrinsically tuneable FBARs. VCOs seem to be one of the most attractive circuits for applications of the tuneable FBAR. They benefit both from high Q-factor (much higher than LC tanks based on semiconductor varactors) and tuneability.
Spartak Gevorgian +2 more
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The FBAR Excited by Lateral Filed
2012Thickness filed excitation and lateral filed excitation are the two kinds of excitation mode in piezoelectric resonator. In this chapter, shear mode FBAR excited by lateral filed is demonstrated in theory and experiment. Theoretical analysis of the Christoffel equation shows that a shear mode wave along thickness direct can be excited in c-axis ...
Yafei Zhang, Da Chen
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Large signal performance of ferroelectric FBARs
2012 IEEE/MTT-S International Microwave Symposium Digest, 2012Ferroelectric thin film bulk acoustic wave resonators (FBARs) have been of growing interest due to their electric field dependent properties. Resonators based on the ferroelectric barium strontium titanate (Ba x Sr (1−x) TiO 3 , BST) are intrinsically switchable, namely they have resonances that switch on with the application of a dc bias voltage.
Victor Lee +3 more
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FBAR resonator figure of merit improvements
2010 IEEE International Ultrasonics Symposium, 2010Free-standing Bulk Acoustic Resonator (FBAR), as one type of bulk acoustic wave (BAW) devices, has extremely high Q to enable excellent filter performance, and has been successfully applied to the wireless communication market. The Bode equation to calculate the unloaded Q is used to map the Avago FBAR product line resonator Rp values.
Yaqiang Wang +5 more
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Temperature compensation of liquid FBAR sensors
Journal of Micromechanics and Microengineering, 2007In this work we demonstrate a practically complete temperature compensation of the second harmonic shear mode in a composite Al/AlN/Al/SiO2 thin film bulk acoustic resonator (FBAR) in the temperature range 25 °C–95 °C. The main advantages of this mode are its higher Q value in liquids as well as its higher frequency and hence higher resolution for ...
J Bjurström +3 more
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FBAR laterally Coupled Resonator Filter
2015 IEEE International Ultrasonics Symposium (IUS), 2015A very attractive CRF (Coupled Resonator Filter) topology is to laterally couple thin film bulk acoustic resonators (FBAR). However, the filter band width is narrow because the coupling between conventional FBAR resonators is very weak. The coupling, and thus the bandwidth, may be increased by forming pairs of FBAR with an inter-digital coupling ...
null Kun Wang +4 more
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High Frequency Viscosity Sensing with FBARs
2006 IEEE International Frequency Control Symposium and Exposition, 2006Film Bulk Acoustic Resonators operating in thickness shear mode at a frequency of 720 MHz are used to characterize liquids with different viscosities. Their advantage over QCM devices are higher packaging density, CMOS-compatibility as well as lower production costs.
Jan Weber +4 more
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Sensors based on SAW and FBAR technologies
SPIE Proceedings, 2013Over the last few years a number of sensing platforms are being investigated for their use in drug development, microanalysis or medical diagnosis. Lab-on-a-chip (LOC) are devices integrating more than one laboratory functions on a single device chip of a very small size, and typically consist of two main components: microfluidic handling systems and ...
L. García-Gancedo +3 more
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A 2GHz voltage tunable FBAR oscillator
IEEE MTT-S International Microwave Symposium Digest, 2003, 2003This paper describes the design and measured performance of a low-noise varactor tuned oscillator based on a film bulk acoustic resonator (FBAR) at 2 GHz. Using varactor tuning, this oscillator demonstrated a 2.5 MHz frequency tuning range at 1985 MHz with a phase noise of -112 dBc/Hz at 10 kHz from the carrier.
A.P.S. Khanna, E. Gane, T. Chong
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Flexible magnetic sensor based on FBAR
2016 IEEE International Nanoelectronics Conference (INEC), 2016Film bulk acoustic wave resonator (FBAR) is widely-used as RF filter or sensor due to its high frequency and Q-factor. This paper demonstrates the feasibility of FBAR as flexible magnetic sensors, like sticker. The proposed Sensor has a ZnO piezoelectric sandwich structure with magnetostrictive nickel (Ni) electrodes on the Polyimide (PI) substrate ...
Yong Wu +4 more
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