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Film Bulk Acoustic Resonators for Parallel Mass Sensing

MRS Proceedings, 2011
ABSTRACTThis paper describes the principle of array sensing with film bulk acoustic resonators (FBARs) for combinatory mass sensing and the use of the arrayed FBAR resonant mass sensor for parallel detection of protein-ligand reactions in liquid environment.
Shih-Jui Chen +3 more
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Film bulk acoustic resonator filters with a coplanar waveguide

The Journal of the Acoustical Society of America, 2007
Multiple thin film bulk acoustic resonators (10, 11) configured in series (10) and parallel (11) within a coplanar waveguide line structure provides a compact ladder filter. The resonators (10, 11) are formed over an opening (28) in a substrate (20) and connected to associated circuitry by one or more transmission lines formed on the substrate (20 ...
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Film bulk acoustic resonator structure and method of making

The Journal of the Acoustical Society of America, 2005
A film bulk acoustic resonator is formed on a substrate having a major surface. The film bulk acoustic resonator includes an elongated stack. The elongated stack includes a layer of piezoelectric material positioned between a first conductive layer deposited on a first surface of the layer of piezoelectric material, and a second conductive layer ...
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Optimization of a Flexible Film Bulk Acoustic Resonator-Based Toluene Gas Sensor