Results 281 to 290 of about 9,207 (319)
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Development of PVDF-TrFE/SiO2 composite film bulk acoustic resonator
Sensors and Actuators A: Physical, 2018This paper reports a film bulk acoustic resonator (FBAR) using polyvinylidene fluoride- trifluoroethylene (PVDF-TrFE)/SiO2 composite. The PVDF-TrFE/SiO2 composite FBAR was designed, simulated and developed. A Micro Electro Mechanical Systems (MEMS) process
Ryosuke Kaneko, J. Froemel, Shuji Tanaka
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The Main Lateral Mode Approximation of a Film Bulk Acoustic Resonator With Perfect Metal Electrodes
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2018Using first principles and the constitutive equations of a piezoelectric crystal, we solve the 2-D problem inside a three-layer film bulk acoustic resonator (FBAR) in order to study the dispersion and parasitic lateral modes’ characteristic of the ...
T. Jamneala +5 more
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Mass Sensor Based on Thin Film Bulk Acoustic Resonator
2009 2nd International Conference on Biomedical Engineering and Informatics, 2009A mass sensor based on thin film bulk acoustic resonator (FBAR) is submitted in this paper. This sensor is fabricated by standard MEMS process as back-etch structure and its resonator curve is measured by Agilent Vector network analyer. The results show that this sensor's Q factor is above 610 and resonance frequency is about 1608MHz.
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On the Linearity of BST Thin Film Bulk Acoustic Resonators
2018 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP), 2018Preliminary measurement results on the linearity of intrinsically switchable BST thin film bulk acoustic resonators (FBARs) are presented. Ferroelectric BST possesses electricfield-piezoelectricity, or electrostriction, which is employed to design intrinsically switchable BST FBARs.
Milad Zolfagharloo Koohi, Amir Mortazawi
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Film bulk acoustic wave resonator and filter technology
1992 IEEE Microwave Symposium Digest MTT-S, 2003Film bulk acoustic resonators (FBARs) are monolithically integrable with semiconductor devices, leading to small-size and low-cost, high-Q RF circuit elements with wide applications in the electronic warfare, radar, and communications areas. The authors review recent developments in film resonators and the miniature monolithic filters based on these ...
S.V. Krishnaswamy +3 more
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Imaging of acoustic fields in bulk acoustic-wave thin-film resonators
Applied Physics Letters, 2000By using an atomic-force-microscope-based technique, we image the vibration of high-frequency, bulk-mode, thin-film resonators. Our experimental technique is capable of monitoring the vibration of these devices over a broad frequency range, from 1 MHz to beyond 10 GHz, allowing us to obtain quantitative measurements of the piezoelectric properties of ...
H. Safar +7 more
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Temperature compensated bulk acoustic thin film resonators
2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121), 2002Thin film resonators have been made that exhibit a high degree of temperature compensation. These resonators are composed of piezoelectric aluminum nitride films, aluminum top and bottom electrodes, and are compensated with layers of silicon dioxide within the resonator.
K.M. Lakin, K.T. McCarron, J.F. McDonald
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Film Bulk Acoustic Wave Resonator in Rf Filters
2018 15th International Computer Conference on Wavelet Active Media Technology and Information Processing (ICCWAMTIP), 2018Film Bulk Acoustic Resonator (FBAR)is widely used as a RF filter in advanced wireless communication system because of its high-Quality Factor (Q)and low inband losses. FBAR is also widely used as a sensor for biomedical and physical sensing. This paper describes the basic concepts of FBAR, device architecture, and the topology used to design the filter.
Muhammad Hunain Memon +4 more
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Transparent thin film bulk acoustic wave resonators
2016 European Frequency and Time Forum (EFTF), 2016Transparent electronic devices have interesting applications in a wide range of fields, such as wearables, intelligent windows, new concepts of smartphones and sensors. In this work we present fully transparent AlN-based thin film bulk acoustic wave solidly mounted resonators. We have used indium-tin oxide as the transparent material for the electrodes
Mario DeMiguel-Ramos +7 more
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