Results 261 to 270 of about 9,207 (319)
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The Journal of the Acoustical Society of America, 2007
A film bulk acoustic resonator includes a first electrode, a piezoelectric film disposed on the first electrode, a second electrode disposed on the piezoelectric film or disposed above the piezoelectric film, and an additional film disposed on and abutting the piezoelectric film. The additional film has at least one pair of opposite sides which are non-
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A film bulk acoustic resonator includes a first electrode, a piezoelectric film disposed on the first electrode, a second electrode disposed on the piezoelectric film or disposed above the piezoelectric film, and an additional film disposed on and abutting the piezoelectric film. The additional film has at least one pair of opposite sides which are non-
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Active area optimisation of film bulk acoustic resonator for improving performance parameters
Electronics Letters, 2020In this Letter, an active area optimisation technique to improve the performance parameters of the film bulk acoustic resonator (FBAR) is proposed. The active area of the back trench membrane-based FBAR is optimised to remove the spurious modes, higher ...
R. Patel, M. Adhikari, D. Boolchandani
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Recent developments of film bulk acoustic resonators
Functional Materials Letters, 2016Film bulk acoustic wave resonator (FBAR) experienced skyrocketing development in the past 15 years, owing to the explosive development of mobile communication. It stands out in acoustic filters mainly because of high quality factor, which enables low insertion loss and sharp roll off. Except for the massive application in wireless communication, FBARs
Junning Gao +3 more
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The research of dual-mode film bulk acoustic resonator for enhancing temperature sensitivity
Semiconductor Science and Technology, 2020A dual-mode film bulk acoustic resonator (DM-FBAR) temperature sensor modulated by different phosphorous-doped silica insertion layers was reported in this paper.
Jiahao Zhao +10 more
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Single crystal aluminum nitride film bulk acoustic resonators
2016 IEEE Radio and Wireless Symposium (RWS), 2016In recent years, film bulk acoustic resonators (FBARs) have become important in the mobile handset market for their small size compared to surface acoustic wave resonators, their compatibility with existing integrated circuit processes, and their usage in synthesizing components such as filters and duplexers. In this work, we demonstrate through finite
James B. Shealy +5 more
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ACS Applied Materials and Interfaces, 2020
Gravimetric resonators based on Micro/Nanoelectromechanical System (M/NEMS) are potential candidates in developing smaller, less expensive, and higher performance gas sensors.
Xu Yan +5 more
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Gravimetric resonators based on Micro/Nanoelectromechanical System (M/NEMS) are potential candidates in developing smaller, less expensive, and higher performance gas sensors.
Xu Yan +5 more
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Adjusting the frequency of film bulk acoustic resonators
The Journal of the Acoustical Society of America, 2006A material may be removed from the top electrode of a film bulk acoustic resonator to alter the mass loading effect and to adjust the frequency of one film bulk acoustic resonator on a wafer relative to other resonators on the same wafer. Similarly, the piezoelectric layer or the bottom electrode may be selectively milled with a focused ion beam to ...
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Beam-supported AlN thin film bulk acoustic resonators
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2006A novel, suspended thin film bulk acoustic wave resonator (SFBAR) has been fabricated from an aluminum nitride film sputtered directly on a (100) silicon substrate. The suspended membrane design uses thin beams to support, as well as electrically connect, the resonator and has been fabricated using both thin film processing and bulk silicon ...
Callaghan, Lori A +3 more
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Thin film bulk acoustic wave resonator
The Journal of the Acoustical Society of America, 2005The present invention is intended to provide a thin film bulk acoustic wave resonator, which has a resonant excitation portion free from damage caused by etching, a high electromechanical coupling coefficient k t 2 and a high quality coefficient Q value, and to provide a thin film bulk acoustic wave resonator having a plurality of different resonant
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Thin-Film Bulk Acoustic Wave Resonators
2012Miniature bulk acoustic wave (BAW) resonators are components that exhibit very interesting properties for communication systems, as confirmed by their extensive use nowadays in front-end filters for mobile phones. This chapter reviews the technology enabling the fabrication of these devices and the different models used to describe their electrical ...
Marc-Alexandre Dubois, Claude Muller
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