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A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films

Journal of Microelectromechanical Systems, 2020
Jialin Wang, Mingyo Park, Stefan Mertin
exaly  

Electrically tunable film bulk acoustic resonator based on Au/ZnO/Al structure

Applied Physics Letters, 2013
Hao Jin, Jian Zhou, Hei Wong
exaly  

Force-sensing characteristics of film bulk acoustic resonator

High Power Laser and Particle Beams, 2015
何婉婧 He Wanjing   +3 more
openaire   +1 more source

ZnO based film bulk acoustic resonator as infrared sensor

Thin Solid Films, 2011
Xiaotun Qiu, Hongyu Yu
exaly  

Erratum to: Tuneable Film Bulk Acoustic Wave Resonators

2013
Spartak Sh. Gevorgian   +2 more
openaire   +1 more source

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