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Switched Mode Thin Film Bulk Acoustic Wave Resonators
2019 IEEE MTT-S International Microwave Symposium (IMS), 2019The development of wireless communication systems with more complexity, greater functionality, and multi-band operation imposes new challenges on the RF front end design. Ferroelectric barium strontium titanate (Ba (x) Sr (1-x) TiO 3 , BST) incorporated into a multi-layer structure, allows for the design of a new class of switched mode thin film bulk ...
Milad Zolfagharloo Koohi, Amir Mortazawi
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Film bulk acoustic-wave resonator based ultraviolet sensor
Applied Physics Letters, 2009This letter described ultraviolet (UV) radiation sensing with ZnO based film bulk acoustic-wave resonator (FBAR). The resonant frequency upshifted when there was UV illumination on the FBAR. For 365 nm UV light, the frequency upshift was 9.8 kHz with an intensity of 600 μW/cm2, and the detection limit of the sensor was 6.5 nW. The frequency increase in
Qiu, Xiaotun +5 more
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Film bulk acoustic wave resonator and filter technology
1992 IEEE Microwave Symposium Digest MTT-S, 2003Film bulk acoustic resonators (FBARs) are monolithically integrable with semiconductor devices, leading to small-size and low-cost, high-Q RF circuit elements with wide applications in the electronic warfare, radar, and communications areas. The authors review recent developments in film resonators and the miniature monolithic filters based on these ...
S.V. Krishnaswamy +3 more
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Film Bulk Acoustic Resonators for Parallel Mass Sensing
MRS Proceedings, 2011ABSTRACTThis paper describes the principle of array sensing with film bulk acoustic resonators (FBARs) for combinatory mass sensing and the use of the arrayed FBAR resonant mass sensor for parallel detection of protein-ligand reactions in liquid environment.
Shih-Jui Chen +3 more
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Acetone sensor based on Film Bulk Acoustic Resonator
2010 IEEE Sensors, 2010This paper described acetone sensing using ZnO based Film Bulk Acoustic Resonator (FBAR). The resonant frequency of the FBAR increased as the concentration of acetone increased. The detection limit of acetone was around 4 ppm. The density decrease of the ZnO induced by releasing carbon dioxide generated from the reaction between acetone and the ...
Xiaotun Qiu +5 more
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Thin film monitoring with silicon bulk acoustic resonators
2008 IEEE Sensors, 2008This paper reports a single-crystal silicon mass sensor based on a square-plate resonant structure excited in the wine glass bulk acoustic mode at a resonant frequency of 2.065 MHz and an impressive quality factor of 4 million at 12 mtorr pressure. Mass loading on the resonator results in a linear downshift in the resonant frequency of this device ...
Joshua E-Y. Lee +2 more
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Vibration analysis of layered film bulk acoustic resonators
Proceedings of the 2010 Symposium on Piezoelectricity, Acoustic Waves and Device Applications, 2010Based on Mindlin elastic plate theory, the displacements in layered film bulk acoustic resonators (FBAR) are expanded in power series along the thickness direction. The strain and stress components are obtained with the basic equations of elasticity theory. The variational equations of motion are then derived by Hamilton principle.
De-jin Huang, Ji Wang
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Film Bulk Acoustic-Wave Resonator based radiation sensor
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, 2010This paper describes a high-energy electromagnetic wave radiation detection device using zinc oxide (ZnO) based Film Bulk Acoustic-Wave Resonator (FBAR). The resonant frequency of the FBAR decreased after gamma radiation, with the peak sensitivity of 9.3 kHz/krad and minimum detectable dosage of 218 rad occurring at the lowest experimental dose of 20 ...
J Oiler +7 more
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Single crystal aluminum nitride film bulk acoustic resonators
2016 IEEE Radio and Wireless Symposium (RWS), 2016In recent years, film bulk acoustic resonators (FBARs) have become important in the mobile handset market for their small size compared to surface acoustic wave resonators, their compatibility with existing integrated circuit processes, and their usage in synthesizing components such as filters and duplexers. In this work, we demonstrate through finite
James B. Shealy +5 more
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MIMO multiplexer based on film bulk acoustic resonator
IEEE Transactions on Consumer Electronics, 2010A miniature multiplexer based on Film Bulk Acoustic Resonator (FBAR) is designed for Multiple-Input Multiple-Output (MIMO) terminal combined 1900 MHz PCS duplexer with 800 MHz Cellular duplexer in this paper. FBAR multiplexer is simulated based on a new FBAR model which combines Mason equivalent circuit model with parasitics model.
Huijin Zhang +3 more
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