Results 211 to 220 of about 9,001 (256)
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Temperature compensated bulk acoustic thin film resonators
2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121), 2002Thin film resonators have been made that exhibit a high degree of temperature compensation. These resonators are composed of piezoelectric aluminum nitride films, aluminum top and bottom electrodes, and are compensated with layers of silicon dioxide within the resonator.
K.M. Lakin, K.T. McCarron, J.F. McDonald
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Mercuric Ion Sensing by a Film Bulk Acoustic Resonator
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2007This paper describes a film bulk acoustic resonator (FBAR) mass sensor for detecting Hg2+ ion in water with excellent sensitivity and selectivity. When a thin Au film was deposited on the surface of an FBAR, the resonant frequency shifted to a lower value when the film was exposed to Hg2+ in aqueous solution. The FBAR sensor detected as low as 10(-9) M
Hao, Zhang +4 more
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Film bulk acoustic resonator (FBAR) device
The Journal of the Acoustical Society of America, 2005Disclosed are a film bulk acoustic resonator (FBAR) device and a method for fabricating the film bulk acoustic resonator (FBAR) device. The film bulk acoustic resonator (FBAR) device comprises a membrane layer having a plurality of active regions and provides different resonant frequencies by providing different thicknesses of the active regions of ...
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Thin-Film Bulk Acoustic Wave Resonators
2012Miniature bulk acoustic wave (BAW) resonators are components that exhibit very interesting properties for communication systems, as confirmed by their extensive use nowadays in front-end filters for mobile phones. This chapter reviews the technology enabling the fabrication of these devices and the different models used to describe their electrical ...
Marc-Alexandre Dubois, Claude Muller
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Mass Sensitive Thin Film Bulk Acoustic Wave Resonators
2006 IEEE International Frequency Control Symposium and Exposition, 2006The mass sensitive effect of RF-filter technology based film and a solidly-mounted acoustic bulk wave single resonator (FBARs and SBARs) is investigated for metrological use. For a high resolution of a sensor system all systematical errors like cross temperature sensitivity must be eliminated.
M. Loschonsky, D. Eisele, L. M. Reindl
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Tunable Resonator Using Film Bulk Acoustic Resonator (Fbar)
The Journal of the Acoustical Society of America, 2011A tunable resonator is provided. The tunable resonator includes a film bulk acoustic resonator (FBAR) for performing a resonance, and at least one driver which is arranged at a side of the FBAR and is deformed and brought into contact with the FBAR by an external signal, thereby changing a resonance frequency of the FBAR.
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Electrical Frequency Tuning of Film Bulk Acoustic Resonator
Journal of Microelectromechanical Systems, 2007This paper describes the design, fabrication, and measurement of an electrically tunable film bulk acoustic resonator (FBAR) that is formed by integrating FBAR with an electrostatic microelectromechanical systems actuator. Around 1.47% tuning of the series resonant frequency ( Deltaf cong 22.5 MHz) at 1.5 GHz is experimentally obtained with an ...
Pang, Wei +4 more
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Film Bulk Acoustic Wave Resonator in Rf Filters
2018 15th International Computer Conference on Wavelet Active Media Technology and Information Processing (ICCWAMTIP), 2018Film Bulk Acoustic Resonator (FBAR)is widely used as a RF filter in advanced wireless communication system because of its high-Quality Factor (Q)and low inband losses. FBAR is also widely used as a sensor for biomedical and physical sensing. This paper describes the basic concepts of FBAR, device architecture, and the topology used to design the filter.
Muhammad Hunain Memon +4 more
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A surface micromachined tunable film bulk acoustic resonator
SPIE Proceedings, 2004This paper reports on the design, modeling, fabrication and measurement of a novel-structured film bulk acoustic resonator (FBAR) that allows frequency tuning by MEMS actuation. FBAR's are micromachined frequency controlling devices working in RF regime.
Wanling Pan +3 more
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A film bulk acoustic resonator in liquid environments
Journal of Micromechanics and Microengineering, 2005A highly sensitive film bulk acoustic resonator (FBAR) mass sensor in liquid environments is described in this paper. A transmission line model is used to theoretically predict the dependence of the FBAR's resonant frequency on added mass. FBAR performance in a liquid environment is experimentally characterized for the first time and the effects of the
Hao Zhang +4 more
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