Results 231 to 240 of about 9,207 (319)

LiNbO₃ Film Bulk Acoustic Resonator for n79 band

2022 IEEE International Ultrasonics Symposium (IUS), 2022
Background, Motivation and Objective Thin film Bulk Acoustic Wave (BAW) resonators based on lithium niobate (LiNbO3) exploiting a longitudinal polarization have been proposed as promising candidates for wide bandwidth filters in the 3 - 6 GHz range [1, 2].
Bousquet, Marie, Borel, Emma, Perreau, Pierre, Soulat, Elisa, Delaguillaumie, Fanny, Castellan, Gaël, Enyedi, Grégory, Delprato, Julien, Reinhardt, Alexandre, Joulie, Alice, Maeder-Pachurka, Catherine   +10 more
semanticscholar   +3 more sources

A High-$k_{t}{}^{2}$ Switchable Ferroelectric Al0.7Sc0.3N Film Bulk Acoustic Resonator

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF), 2020
This work demonstrates the hysteresis behavior and temperature characterization of an AlScN Film bulk acoustic resonator (FBAR) with ∼30% $\text{Sc}/(\text{Al}+\text{Sc})$ ratio.
Jialin Wang, Mingyo Park, S. Mertin, T. Pensala, F. Ayazi, A. Ansari   +5 more
semanticscholar   +2 more sources

Single-mode high frequency LiNbO3 Film Bulk Acoustic Resonator

IUS, 2019
In this paper, Y+163°-cut LiNbO3 (LNO) Film Bulk Acoustic Resonators (FBAR) with patterned bottom electrodes (AlSi or W) and a sacrificial layer cavity have been fabricated using a layer transfer process (4-inch).
M. Bousquet, G. Enyedi, J. Dechamp, M. Zussy, P. S. Pokam Kuisseu, F. Mazen, C. Billard, A. Reinhardt, M. Bertucchi, P. Perreau, G. Castellan, C. Maeder-Pachurka, D. Mercier, J. Delprato, A. Borzì, S. Sejil   +15 more
semanticscholar   +2 more sources

Film Bulk Acoustic-Wave Resonator based radiation sensor

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, 2010
This paper describes a high-energy electromagnetic wave radiation detection device using zinc oxide (ZnO) based Film Bulk Acoustic-Wave Resonator (FBAR). The resonant frequency of the FBAR decreased after gamma radiation, with the peak sensitivity of 9.3 kHz/krad and minimum detectable dosage of 218 rad occurring at the lowest experimental dose of 20 ...
Jonathon Oiler, Xiaotun Qiu, Jie Zhu 0008, Ziyu Wang, Cunjiang Yu, Hugh J. Barnaby, Keith E. Holbert, Hongyu Yu   +7 more
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Dual-mode resonant infrared detector based on film bulk acoustic resonator toward ultra-high sensitivity and anti-interference capability

Applied Physics Letters, 2018
Here, we demonstrate an uncooled, miniaturized, and high resolution infrared (IR) detector based on an aluminum nitride (AlN) film bulk acoustic resonator with dual resonant modes. Due to temperature dependence of the resonance frequency of the resonator
Cong Chen, Hong Zhou, Xiaojing Mu
exaly   +2 more sources

Fabrication and RF characterization of zinc oxide based Film Bulk Acoustic Resonator

Superlattices and Microstructures, 2018
This work reports fabrication and characterization of Film Bulk Acoustic Resonator (FBAR) to improve the performance characteristics for RF filter and sensing application.
Raju Patel, Deepak Bansal, Kamaljit Rangra   +2 more
exaly   +2 more sources

Acetone sensor based on Film Bulk Acoustic Resonator

2010 IEEE Sensors, 2010
This paper described acetone sensing using ZnO based Film Bulk Acoustic Resonator (FBAR). The resonant frequency of the FBAR increased as the concentration of acetone increased. The detection limit of acetone was around 4 ppm. The density decrease of the ZnO induced by releasing carbon dioxide generated from the reaction between acetone and the ...
Xiaotun Qiu, Rui Tang, Jie Zhu, Hongyu Yu, Jon Oiler, Ziyu Wang   +5 more
openaire   +2 more sources

ZnO based film bulk acoustic resonator as infrared sensor

Thin Solid Films, 2011
This paper reported the investigation of an infrared (IR) sensitive, ZnO based Film Bulk Acoustic Resonator (FBAR). The resonant frequency of the FBAR decreased under IR illumination, and results demonstrated a linear dependence on IR intensity.
Xiaotun Qiu, Hongyu Yu
exaly   +2 more sources

A Sc0.2Al0.8N-based 14 GHz Film Bulk Acoustic Resonator with over 8% Coupling Coefficient and over 400 Quality factor for Ku-band applications

IUS, 2023
It’s challenging to scale down the stack of the acoustic resonator to achieve high frequency like >8 GHz, because of the low crystallinity of the thin piezoelectric film and large parasitics in ultrathin electrode layers. In this work, film bulk acoustic
Chen Liu, Xinghua Wang, Wenjia Yang, Ying Zhang, E. Woo, Yao Zhu   +5 more
semanticscholar   +1 more source