Results 231 to 240 of about 9,001 (256)

Adjusting the frequency of film bulk acoustic resonators

The Journal of the Acoustical Society of America, 2006
A material may be removed from the top electrode of a film bulk acoustic resonator to alter the mass loading effect and to adjust the frequency of one film bulk acoustic resonator on a wafer relative to other resonators on the same wafer. Similarly, the piezoelectric layer or the bottom electrode may be selectively milled with a focused ion beam to ...
openaire   +1 more source

Tuneable Film Bulk Acoustic Wave Resonators

2013
Spartak Sh Gevorgian, Alexander K Tagantsev, Andrei K Vorobiev   +2 more
openaire   +1 more source

Multilayer Integrated Film Bulk Acoustic Resonators

2013
Yafei Zhang, Da Chen
openaire   +1 more source

Highly sensitive detection of organophosphorus pesticides by acetylcholinesterase-coated thin film bulk acoustic resonator mass-loading sensor

Biosensors and Bioelectronics, 2013
Da Chen
exaly  

Nerve gas sensor using film bulk acoustic resonator modified with a self-assembled Cu2+/11-mercaptoundecanoic acid bilayer

Sensors and Actuators B: Chemical, 2010
Da Chen
exaly  

Creation and control of multi-phonon Fock states in a bulk acoustic-wave resonator

Nature, 2018
Yiwen Chu, Prashanta Kharel, Luigi Frunzio   +2 more
exaly  

Miniaturized polymer coated film bulk acoustic wave resonator sensor array for quantitative gas chromatographic analysis

Sensors and Actuators B: Chemical, 2018
Hemi Qu, Ye Chang, Jing Liu
exaly  

A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

Applied Physics Letters, 2010
Wencheng Xu, Seokheun Choi, Junseok Chae
exaly  

ZnO-based film bulk acoustic resonator for high sensitivity biosensor applications

Applied Physics Letters, 2007
Yu Wang
exaly  

Hydrogen sensor based on Pd-functionalized film bulk acoustic resonator

Sensors and Actuators B: Chemical, 2011
Da Chen
exaly