Results 251 to 260 of about 9,207 (319)

Modeling, fabrication, and structural characterization of thin film ZnO based film bulk acoustic resonator

, 2021
This work reports the finite element modeling, fabrication and structural characterization a film bulk acoustic resonator (FBAR) devices using shadow mask technique.
A. Johar, Gopal Sharma, Aunj Kumar, H. Kumar, T. Varma, C. Periasamy, A. Agarwal, D. Boolchandani   +7 more
semanticscholar   +1 more source

Electromagnetic modeling of thin-film bulk acoustic resonators

2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535), 2004
This paper introduces a novel technique for the electromagnetic analysis of thin-film bulk acoustic-wave resonators. The piezoelectric/acoustic linear equations are coupled to and solved together with Maxwell's equations. For the acoustic propagation, locally monodimensional behavior is assumed, while full-wave three-dimensional Maxwell's equations are
M. Farina, T. Rozzi
openaire   +1 more source

Frequency tuning of film bulk acoustic resonators

SPIE Proceedings, 2006
This paper suggests a design for a Film Bulk Acoustic Resonator (FBAR) which utilizes a secondary piezoelectric layer for purposes of tuning the FBAR's resonant frequency. Currently, many ceramic resonators have difficulties in on-chip integration, power handling and electrode fabrication.
Amanda A. Frederick, Hsin-Hua Hu, William W. Clark   +2 more
openaire   +1 more source

Film bulk acoustic wave resonator technology

IEEE Symposium on Ultrasonics, 2002
It is demonstrated that completely monolithic two-pole filters can be fabricated on silicon substrates using FBARs (film bulk acoustic resonators) and that these filters have low loss and reasonable bandwidth. A two-pole monolithic ladder filter operating in the 1-1.5 GHz range has been demonstrated.
S.V. Krishnaswamy, J. Rosenbaum, S. Horwitz, C. Vale, R.A. Moore   +4 more
openaire   +1 more source

High-Performance Film Bulk Acoustic Resonator and Filter Based on an Al0.8Sc0.2N Film Prepared by a Low-Temperature Staged Deposition Method

IEEE Transactions on Electron Devices
The poor crystal quality of AlScN films is a serious obstacle to the development of broadband film bulk acoustic resonator (FBAR) filters. To address this issue, a low-temperature staged deposition method was proposed, in which a single-crystalline AlN ...
Zhipeng Chen, Kaibin Xu, Tianyou Luo, Guowei Zhi, Yuhan Zhu, Peidong Ouyang, Guoqiang Li   +6 more
semanticscholar   +1 more source

A flexible high quality-factor bulk acoustic resonator enabled with transferred single-crystal piezoelectric thin film for sensing applications

, 2021
This paper proposes a flexible lateral-field-excited (LFE) film bulk acoustic resonator (FBAR) using transferred single-crystalline LiTaO3 piezoelectric thin films.
Yanmei Xue, Changjian Zhou, Xiu Yin Zhang, M. Chan   +3 more
semanticscholar   +1 more source

A film bulk acoustic resonator in liquid environments

Journal of Micromechanics and Microengineering, 2005
A highly sensitive film bulk acoustic resonator (FBAR) mass sensor in liquid environments is described in this paper. A transmission line model is used to theoretically predict the dependence of the FBAR's resonant frequency on added mass. FBAR performance in a liquid environment is experimentally characterized for the first time and the effects of the
Hao Zhang, Mong S Marma, Eun Sok Kim, Charles E McKenna, Mark E Thompson   +4 more
openaire   +1 more source

Micromachined thin film bulk acoustic resonators

Proceedings of IEEE 48th Annual Symposium on Frequency Control, 2002
We have fabricated thin film bulk acoustic resonators (FBARS) with measured Q's of over 1000 and resonant frequencies as low as 1.5 GHz and as high as 7.5 GHz. The device, as currently fabricated, consists of the piezoelectric material aluminum nitride (AlN) sandwiched between electrodes all of which lie on a thin low-stress silicon nitride (Si/sub x/N/
R. Ruby, P. Merchant
openaire   +1 more source

A scandium doped aluminum nitride thin film bulk acoustic resonator

Journal of Micromechanics and Microengineering
Currently, we stand at the forefront of revolutionary advancements in communication technology. The escalating demands of advanced communication necessitate enhanced performance from materials and radio frequency devices.
Chao Gao, Yaxin Wang, Yao Cai, Binghui Lin, Yang Zou, Qinwen Xu, Tingting Yang, Wenjuan Liu, Yan Liu, Shishang Guo, Chengliang Sun   +10 more
semanticscholar   +1 more source

A Hybrid Film-Bulk-Acoustic-Resonator/Coupled-Line/Transmission-Line High Selectivity Wideband Bandpass FBAR Filter

IEEE transactions on microwave theory and techniques, 2020
A hybrid wideband filter composed of two sections with sharp frequency selectivity is proposed in this article. The first section consists of a coupled line (CL), two transmission lines (TL), and a film bulk acoustic resonator (FBAR) with lower frequency.
Haopeng Wu, Yongle Wu, Z. Lai, Weimin Wang, Qinghua Yang   +4 more
semanticscholar   +1 more source