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Low Phase Noise, Dual-Frequency Pierce MEMS Oscillators with Direct Print Additively Manufactured Amplifier Circuits. [PDF]

open access: yesMicromachines (Basel)
Li L   +8 more
europepmc   +1 more source
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A Hybrid Film-Bulk-Acoustic-Resonator/Coupled-Line/Transmission-Line High Selectivity Wideband Bandpass FBAR Filter

IEEE Transactions on Microwave Theory and Techniques, 2020
A hybrid wideband filter composed of two sections with sharp frequency selectivity is proposed in this article. The first section consists of a coupled line (CL), two transmission lines (TL), and a film bulk acoustic resonator (FBAR) with lower frequency. This section mainly controls the lower roll-off.
Haopeng Wu   +4 more
openaire   +3 more sources

AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications — A review

Surface and Coatings Technology, 2010
A new type of biosensor device is here presented which is fabricated using the same processes used for the fabrication of integrated electrical circuits to enable tighter integration and further se ...
openaire   +3 more sources

Film Bulk Acoustic-Wave Resonator (FBAR) based ultraviolet sensor

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, 2009
This paper described ultraviolet (UV) radiation sensing using ZnO based Film Bulk Acoustic-wave Resonator (FBAR). The resonant frequency upshifted when there was UV illumination on the FBAR. For 365 nm UV light, the frequency upshift was 9.8 kHz with an intensity of 600 µW/cm2, and the detection limit of the sensor was 6.5 nW. The frequency increase of
X. Qiu   +5 more
openaire   +1 more source

Film Bulk Acoustic-wave Resonator (FBAR) based humidity sensor

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, 2010
This paper described relative humidity (RH) sensing with ZnO based Film Bulk Acoustic-wave Resonator (FBAR). The resonant frequency of the FBAR decreased in a two-stage manner as the RH increased in the environment. For low RH (RH 50%), a frequency shift of 8.5 kHz per 1% RH change was obtained, which was due to the mass loading effect of the water ...
null Xiaotun Qiu   +5 more
openaire   +1 more source

Film Bulk Acoustic-wave Resonator (FBAR) based infrared sensor

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, 2010
This paper described an infrared (IR) radiation sensor based on Film Bulk Acoustic-wave Resonator (FBAR). The resonant frequency of FBAR sensor downshifts linearly when there is IR (peak wavelength at 780nm) illumination on the device. This effect attributed to the temperature sensitivity of the FBAR.
null Ziyu Wang   +4 more
openaire   +1 more source

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