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Finite element modelling of a thin‐film bulk acoustic resonator (FBAR)

COMPEL - The international journal for computation and mathematics in electrical and electronic engineering, 2008
PurposeThe paper aims to propose a three‐dimensional (3D) finite element analysis to evaluate the electrical performances of a FBAR (thin‐film bulk acoustic resonator) resonator.Design/methodology/approachThe piezoelectric theory that uses an equivalent circuit is able to evaluate the thickness‐extensional vibration modes in simple 1D configuration but
BUCCELLA, CONCETTINA   +3 more
openaire   +1 more source

Thin film bulk wave acoustic resonators (FBAR) for wireless applications

2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263), 2002
For some time, FBAR technology has lagged behind ceramic technology and surface acoustic wave resonator (SAW) technology for commercial applications. There were several technologies that had to be developed before FBAR technology became viable for rf filters. First, a process is needed that can make the resonators manufacturable, robust and repeatable.
R.C. Ruby   +4 more
openaire   +1 more source

3D simulation of thin-film bulk acoustic wave resonators (FBAR)

2006 13th IEEE International Conference on Electronics, Circuits and Systems, 2006
This article discusses numerical simulations of thin film bulk acoustic wave resonators. FBAR simulation with 1D analytical model permits to quickly determine resonator layers thickness that correspond to the objective resonant frequency. 3D finite element method permits to investigate the effect of the electrode shape on the spurious modes that are ...
Sylvain Giraud   +3 more
openaire   +1 more source

A film bulk acoustic resonator (FBAR) duplexer for USPCS handset applications

2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157), 2002
We will describe the design and measured performance of a duplexer based on film bulk acoustic resonators (FBARs) for the 1900 MHz PCS cellular phone market. Typical specifications for the duplexer require the Tx filter to attenuate frequencies in the Rx band by >40 dB while maintaining a worst-case insertion loss of 3.5 dB over the Tx band.
P. Bradley   +4 more
openaire   +1 more source

Study of structural fabrication process of Film Bulk Acoustic Resonator (FBAR)

2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications, 2008
Thin film bulk acoustic resonator, grown based on the MEMS fabrication technology simultaneously, has become one of the most positive devices within the area of wireless communication application. FBAR has such distinct advantages as higher frequency, smaller volume, better power handling capabilities, higher Q-values and well compatibility with IC ...
Guang-jun Huang   +4 more
openaire   +1 more source

Film bulk acoustic resonator (FBAR) device

The Journal of the Acoustical Society of America, 2005
Disclosed are a film bulk acoustic resonator (FBAR) device and a method for fabricating the film bulk acoustic resonator (FBAR) device. The film bulk acoustic resonator (FBAR) device comprises a membrane layer having a plurality of active regions and provides different resonant frequencies by providing different thicknesses of the active regions of ...
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Room Temperature Ozone Detection using ZnO based Film Bulk Acoustic Resonator (FBAR)

Journal of The Electrochemical Society, 2011
This study describes room temperature ozone sensing with a ZnO based film bulk acoustic resonator (FBAR). The resonant frequency of FBAR decreased upon ozone exposure. For 1400 ppb ozone, the frequency downshift was 131 kHz with a response time of 12 s.
Wang, Ziyu   +3 more
openaire   +2 more sources

Tunable Resonator Using Film Bulk Acoustic Resonator (Fbar)

The Journal of the Acoustical Society of America, 2011
A tunable resonator is provided. The tunable resonator includes a film bulk acoustic resonator (FBAR) for performing a resonance, and at least one driver which is arranged at a side of the FBAR and is deformed and brought into contact with the FBAR by an external signal, thereby changing a resonance frequency of the FBAR.
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Optimization of film bulk acoustic wave resonator (FBAR) for RF filter applications

Radio and Wireless Conference, 2003. RAWCON '03. Proceedings, 2004
In this paper, we present the effects of the thermal annealing of the W/SiO/sub 2/ multi-layer Bragg reflectors on the resonance characteristics of the ZnO-based film bulk acoustic resonator (FBAR) devices and the use of the cobalt (Co) electrodes instead of the aluminum (Al) electrodes to optimize the FBAR for RF filter applications.
null Munhyuk Yim   +5 more
openaire   +1 more source

Optimization on Thin Film Bulk Acoustic Resonator (FBAR) by Transmitting Line Method

Advanced Materials Research, 2012
In this paper, the transmitting line method is applied to analyze the properties of FBAR, and the input impedance equation is obtained, and the series resonance frequency fsand the parallel resonance frequency fpare calculated by this method. Moreover, the elastic effects of the electrode on the effective electromechanical coupling factor, k2eff, and ...
Tao Zhang   +4 more
openaire   +1 more source

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