Results 181 to 190 of about 1,189 (200)
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Boosting Quality Factor in 15 GHz Film Bulk Acoustic Resonators (FBAR)

2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)
Chen Liu   +5 more
openaire   +1 more source

High-performance FBAR humidity sensor based on the PI film as the multifunctional layer

Sensors and Actuators B: Chemical, 2020
Jihang Liu, Zhen Fang, Yusi Zhu
exaly  

A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films

Journal of Microelectromechanical Systems, 2020
Jialin Wang, Mingyo Park, Stefan Mertin
exaly  

ZnO based film bulk acoustic resonator as infrared sensor

Thin Solid Films, 2011
Xiaotun Qiu, Hongyu Yu
exaly  

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