Results 161 to 170 of about 1,189 (200)

Sensitivity of thin-film bulk acoustic resonators (FBAR) to localized mechanical forces

Journal of Micromechanics and Microengineering, 2013
We report on the sensitivity of thin-film bulk acoustic resonators (FBARs) to localized contact mechanical forces, their design for high sensitivity and the performance under different forcing conditions and mechanisms. Cantilever and membrane structures are the examples chosen for structure and process flow design, finite element modeling and ...
H Campanella, C J Camargo, J Esteve, J M Tsai   +3 more
openaire   +1 more source

Fabrication of high-Q film bulk acoustic resonator (FBAR) filters with carbon nanotube (CNT) electrodes

2010 IEEE International Ultrasonics Symposium, 2010
FBAR devices with carbon nanotube (CNT) electrodes have been developed withthe aim of taking advantage of the low density and high acoustic impedance ofthe CNTs compared to other known materials. The influence of the CNTs on thefrequency response of the FBAR devices was studied by comparing two identicalsets of devices, one set comprised FBARs ...
Garcia-Gancedo, L., Al-Naimi, F., Flewitt, A. J., Milne, W. I., Ashley, G. M., Luo, J. K., Zhao, X. B., Lu, J. R.   +7 more
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Extraction of Material Parameters in Film Bulk Acoustic Resonator (FBAR) Using Genetic Algorithm

IEEE Electron Device Letters, 2004
The extraction of material parameters from the given (or measured) input impedance of film bulk acoustic resonators (FBARs) using a genetic algorithm (GA) is proposed. After studying the effect of material parameter changes on impedance responses, resonance characteristics of FBARs are used to extract the material parameters.
J. Lee, J. Jung, J.-I. Park, H. Kim
openaire   +1 more source

Thin film bulk wave acoustic resonators (FBAR) based filters

2004 14th International Crimean Conference "Microwave and Telecommunication Technology" (IEEE Cat. No.04EX843), 2004
The advantages, constructions, materials for production of FBAR are analyzed. Active schemes of filters based on FBAR are proposed, and the results of modeling of active piezoelectric filters are discussed.
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Focused-ion-beam-assisted tuning of thin-film bulk acoustic wave resonators (FBARs)

Journal of Micromechanics and Microengineering, 2007
A focused-ion-beam-assisted procedure with the aim of frequency tuning thin-film bulk acoustic resonators (FBARs) is presented. The procedures of focused-ion-beam-based deposition and milling on the FBAR are described, detailing calibration and alignment issues.
Humberto Campanella, Francisco Hernández-Ramírez, Albert Romano-Rodríguez, Josep Montserrat, Arantxa Uranga, Nuria Barniol, Jaume Esteve   +6 more
openaire   +1 more source

Resonant properties of thin film bulk acoustic resonator (FBARs) with considering the two dimensional size effects

2013 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications, 2013
The piezoelectric thin film bulk acoustic resonators (FBARs) is a new kind frequency devices, which has exhibited several prominent advantages. In this paper, the typical models of FBAR are established to analyze modal resonance frequency with ANSYS codes. The results for the modal resonance frequencies vs. width-to-thickness aspect ratio were obtained.
Xin-Yi Luo, De-Jin Huang, Wen-Liang Zhang, Ji Wang   +3 more
openaire   +1 more source

A Film Bulk Acoustic Resonator (FBAR) L Band Low Noise Oscillator for Digital Communications

32nd European Microwave Conference, 2002, 2002
This paper describes the design and measured performance of a low-noise L band oscillator based on Agilent's Film Bulk Acoustic Resonator (FBAR) for applications in digital communication systems. This experimental oscillator demonstrated at 1951 MHz with a phase noise of - 115 dBc/Hz at 10KHz from the carrier represents the first example of a low noise
A.P.S. Khanna, Ed Gane, Thomas Chong, Herb Ko, Paul Bradley, Richard Ruby, John D. Lars   +6 more
openaire   +1 more source

Polymer coated film bulk acoustic resonator (FBAR) arrays for Indoor Air Quality (IAQ) monitoring

2015 IEEE SENSORS, 2015
In this work we present a miniaturized electronic nose (E-Nose) sensor platform made by integrating film bulk acoustic resonators (FBARs) with arrays of CMOS oscillators. Each of the FBARs in the array is chemically activated to differing vapors (odors) after depositing a variety of polymers on the active areas of the resonators.
null Si Hoon Lee, null Yongmi Jung, null Taepyeong Kim, null Taegyu Kim, null Younghwan Kim, null Suntae Jung   +5 more
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Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): Area and mass location aspects

Sensors and Actuators A: Physical, 2008
Abstract Localized-mass sensors using thin-film bulk acoustic resonators (FBAR) have been implemented for the study of sensitivity and possible configurations in biological applications. In a first experiment, a group of resonators are loaded with the same amount of mass but different contact areas, achieving responsivities as high as 10 −19  g/Hz ...
Humberto Campanella, Arantxa Uranga, Albert Romano-Rodríguez, Josep Montserrat, Gabriel Abadal, Nuria Barniol, Jaume Esteve   +6 more
openaire   +1 more source

Thermal Analysis and Characterization of a High Q Film Bulk Acoustic Resonator (FBAR) as Biosensers in Liquids

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, 2009
This paper presents the thermal analysis and characterization of a zinc oxide (ZnO) based film bulk acoustic resonator (FBAR) having a high quality factor (Q) in liquid environments for biosensing applications. Q of up to 120, an improvement of at least 8× greater than state-of-the-art devices in liquids, are achieved by integrating microfluidic ...
Xu Zhang, Wencheng Xu, Abbas Abbaspour-Tamijani, Junseok Chae   +3 more
openaire   +1 more source