Results 211 to 220 of about 8,885 (258)
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Diamond fixed abrasive lapping of brittle substrates
Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing, 2004Advances in a new slurry-free diamond fixed abrasive technology developed by 3M for lapping of brittle substrates are reviewed. Results on brittle substrates such as glass, ceramics, CaF2, ZnSe, SiC, and sapphire are presented.
Tim D. Fletcher +2 more
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Status and Trends of Fixed Abrasive Polishing on Semiconductor
Key Engineering Materials, 2012The necessity of fixed abrasive CMP in polishing semiconductor materials processing was analyzed. Compared the shortcomings of traditional free abrasive polishing with the advantages of fixed abrasive polishing, the applications of fixed abrasive polishing technology in semiconductor processing were described.
Y. Zhao, Dun Wen Zuo, Yu Li Sun
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An investigation of material removal in polishing with fixed abrasives
Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 2002This paper investigates the removal of material from a surface during polishing with fixed abrasives. The material removal profile prescribes the amount of material removed from the surface along a direction orthogonal to the tool path as a polishing tool is moved along the surface.
L Zhang +4 more
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Pattern density effects in fixed abrasive polishing
MRS Proceedings, 2002AbstractWe investigated pattern density effects during chemical mechanical planarization (CMP) for shallow trench isolation (STI) applications using fixed abrasive pads to better control the fixed abrasive polishing process. We observed that the polishing characteristics of higher pattern density features are strongly dependent on the presence of lower
Rajasekhar Venigalla +2 more
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Air abrasion: fixing the cutting edge.
Dentistry today, 2000The cutting edges of the anterior teeth can be preserved and/or restored using proper concepts and instrumentation. Air abrasion is uniquely well-suited for preparing the class VI restoration.
R M, Blitzer, N R, Gottehrer
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Semi-Fixed Abrasive Machining for Plane Aluminium
Key Engineering Materials, 2009Aluminum is a non-ferrous metal material which has excellent comprehensive performance. It has been widely used in many sectors. In this paper, plane abrasive machining is carried out for the aluminum. The quality of the Al specimen’s surface is compared after the semi-fixed and loose abrasive processing.
Ju Long Yuan +3 more
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An Investigation to Semi-Fixed Abrasives Plate Characteristics
Key Engineering Materials, 2009The most typical example of hard and brittle material is advanced ceramics, for its ultra-precision machining difficulty and wide applications, now it becomes a focus of attention. Semi-fixed abrasive plate (SFAP) is newly developed for preventing larger particles from doing workpiece surface damage in machining advanced ceramics, for larger particles ...
Qian Fa Deng +4 more
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Preparation and Evaluation of Hydrophilic Fixed Abrasive Pad
Key Engineering Materials, 2010The swelling ratio and the pencil hardness of pad were introduced to evaluate the properties of hydrophilic fixed abrasive (FA) pad. The effect of pad composition on its swelling ratio and pencil hardness was studied. Results show that the swelling ratio increases with the rise of content of Trimethylopropane Triacrylate (TMPTA) and Urethane Acrylate ...
Yong Wei Zhu, Jun Li, Jun Wang, Kui Lin
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On the Characteristic Parameters of the Semi-Fixed Abrasive Plate
Advanced Materials Research, 2009To evaluate the characteristics of semi-fixed abrasive plate (SAP), several parameters and relevant measurement methods are developed. The characteristic parameters include shore hardness, compression ratio, resilience ratio and shear strength. Five semi-fixed abrasive plates are manufactured with different bond concentration.
Ping Zhao +5 more
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Self-Conditioning Fixed Abrasive Pad in CMP
Journal of The Electrochemical Society, 2004It has been known that overpolishing in chemical mechanical polishing (CMP) depends on pattern selectivity as a function of density and pitch, and use of a fixed abrasive pad is one method which can improve the pattern selectivity. This paper introduces the fixed abrasive pad using the swelling characteristic of hydrophilic polymers, which can acquire ...
Hoyoun Kim +4 more
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