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Fixed abrasive grinding of CVD SiC mirrors
Precision Engineering, 1994Abstract A strategy for machining ceramic (silicon carbide) mirrors is described. By taking advantage of the relative ductility of ceramics compared with that of glass, it is shown that fixed-abrasive, ultraprecision grinding is a viable fabrication process for high-performance aspheric mirrors.
Thomas Bifano, Yuan Yi, Keith Kahl
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A novel fixed abrasive process: chemo-mechanical grinding technology
International Journal of Manufacturing Technology and Management, 2005As finishing techniques for Si wafers, the free abrasive processes like lapping and polishing are able to offer a better surface roughness when finer abrasives are applied, but fall short of maintaining profile accuracy when the wafer size increases. On the other hand, the fixed abrasive process or grinding is known as a promising solution to improve ...
Libo Zhou, Jun Shimizu, Hiroshi Eda
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Measuring abrasion resistance with a fixed abrasive loop
Wear, 2005K.G. Budinski, L.K. Ives
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Silica-assisted fixed agglomerated diamond abrasive polishing
Journal of Manufacturing Processes, 2020Cong Ding, Jiapeng Chen, Yanan Peng
exaly
Super hard and brittle material removal mechanism in fixed abrasive lapping: Theory and modeling
Tribology International, 2023Jiapeng Chen, Yanan Peng
exaly