Results 261 to 268 of about 925,106 (268)

The influence of the types of cluster composite abrasives on the performance of fixed abrasive pads in processing quartz glass

Materials Today Communications
Zhankui Wang, Pengzhan Wang, Xiaokun Wei, Minghua Pang, Wei Feng, Yunlong Yao, Jianxiu Su   +6 more
openaire   +1 more source

Study on the Preparation Technology of Fixed Abrasive Polishing Pad in Chemical Mechanical Polishing

Applied Mechanics and Materials, 2014
Jian Guo Yao, Jian Xiu Su, Su Jian Xiu
exaly  

Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

Industrial Lubrication and Tribology
Minghua Pang, Wang Zhankui
exaly  

Study on the Influence of Curing Method on the Lapping Performance of Fixed Abrasive Pads

Journal of Materials Engineering and Performance
Zhan-kui Wang, Feng-song Dong, Zhi-cheng Zhao, Kun-cheng Liu, Xu Zhang, Yun-long Yao, Ming-hua Pang, Li-jie Ma, Jian-xiu Su   +8 more
openaire   +1 more source

Effect of slurry and fixed abrasive pad on chemical mechanical polishing of SiC wafer

Materials Science in Semiconductor Processing
Daqing Zhou
exaly  

Polishing characteristics of fixed-abrasive pad by using nano-aggregate silica

Optics and Precision Engineering, 2016
openaire   +1 more source

Copper Chemical Mechanical Polishing Using Fixed-abrasive Polishing Pad

1999
Nguyen Hoang, V., Hof, A., van Kranenburg, H., Woerlee, P.H., Weimar, F.   +4 more
openaire   +1 more source

METHOD FOR CHEMICAL-MECHANICAL PLANARIZATION OF A SUBSTRATE ON A FIXED-ABRASIVE POLISHING PAD

1998
openaire   +2 more sources