Results 241 to 250 of about 1,307,014 (250)

Study on the Influence of Curing Method on the Lapping Performance of Fixed Abrasive Pads

Journal of Materials Engineering and Performance
Zhan-kui Wang, Feng-song Dong, Zhi-cheng Zhao, Kun-cheng Liu, Xu Zhang, Yun-long Yao, Ming-hua Pang, Li-jie Ma, Jian-xiu Su   +8 more
openaire   +1 more source

reconditioning mechanism for fixed abrasive pads based on the wear behavior of loose grains

Precision Engineering
Baoxiu Wang, Jiapeng Chen, Zhenlin Jiang
exaly  

Effect of slurry and fixed abrasive pad on chemical mechanical polishing of SiC wafer

Materials Science in Semiconductor Processing
Liantong Yang, Hongyan Zhao
exaly  

Polishing characteristics of fixed-abrasive pad by using nano-aggregate silica

Optics and Precision Engineering, 2016
openaire   +1 more source

The wear behavior and lapping performance of fixed abrasive pad for acidity and alkalinity of lapping fluid in lapping quartz glass

Tribology International
Wang Zhankui, Yanyan Yan
exaly  

Research on composite pattern design and lapping performance of fixed abrasive pads controlled by multi-physical fields

Precision Engineering
Zhongwei Hu, Congfu Fang
exaly  

Performance on lapping quartz glass by UV curing fixed abrasive pad with Gr2O3-diamond composite abrasives

Materials Science in Semiconductor Processing
Zhankui Wang, Pengzhan Wang, Fengsong Dong, Minghua Pang, Lijie Ma, Hongyuan Zhao, Jianxiu Su   +6 more
openaire   +1 more source

Exploring the effect of three-item hybrid fixed abrasive pads on their lapping processing performance of quartz glass

Materials Science in Semiconductor Processing
Wang Zhankui, Hongyuan Zhao, Shangci Huang   +2 more
exaly  

Copper Chemical Mechanical Polishing Using Fixed-abrasive Polishing Pad

1999
Nguyen Hoang, V., Hof, A., van Kranenburg, H., Woerlee, P.H., Weimar, F.   +4 more
openaire   +1 more source

METHOD FOR CHEMICAL-MECHANICAL PLANARIZATION OF A SUBSTRATE ON A FIXED-ABRASIVE POLISHING PAD

1998
openaire   +2 more sources