Results 241 to 250 of about 925,106 (268)
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IEEE Transactions on Semiconductor Manufacturing, 2004
Minimization of particulates levels during the chemical-mechanical planarization (CMP) process as well as in the waste streams is possible through the use of a fixed abrasive pad (FAP). The abrasion of electrodeposited copper films using an alumina-based FAP was studied in hydrogen peroxide and hydroxylamine-based chemistries.
W.H. Huang +3 more
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Minimization of particulates levels during the chemical-mechanical planarization (CMP) process as well as in the waste streams is possible through the use of a fixed abrasive pad (FAP). The abrasion of electrodeposited copper films using an alumina-based FAP was studied in hydrogen peroxide and hydroxylamine-based chemistries.
W.H. Huang +3 more
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Process Optimization of Lapping Sapphire Substrate with Fixed Diamond Abrasive Pad
Key Engineering Materials, 2016The production cost of the sapphire substrate was restricted by the efficiency of processing and the surface quality. A proposed level orthogonal experiment was conducted to reveal the effect of workbench speed, lapping pressure, the Concentration of triethanolamine and abrasive pad types on the material removal rate and surface roughness and ...
Jian Bin Wang +4 more
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The Fuzzy Comprehensive Evaluation of the Self-Conditioning of Hydrophilic Fixed-Abrasive Pad
Advanced Engineering Forum, 2018The self-conditioning of hydrophilic fixed abrasive lapping based on the principle of two-body (pad-wafer) abrasion has great importance on the MRR (material removal rate) of wafer. The physical and mechanical properties of pad were taken as set of available alternatives. Fuzzy comprehensive evaluation principle was applied to establish a model for the
Zhi Lan Ju, Yong Wei Zhu, Fu Bao Zhang
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Study of Pattern Density Effects in CMP Using Fixed Abrasive Pads
Journal of The Electrochemical Society, 2003Pattern density effects during chemical-mechanical planarization (CMP) for shallow trench isolation applications using fixed abrasive pads were investigated in this work. Wafers patterned with various test masks, having a mix of pattern densities, were polished, and their polishing characteristics are correlated to their respective pattern density ...
Venkata R. Gorantla +4 more
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Groove Influence on Lapping Quartz Glass with Fixed Abrasive Pad
ECS Journal of Solid State Science and TechnologyTo improve the lapping efficiency and process stability of quartz glass, this paper investigated the lapping mechanism of raised abrasive pads (RAP). Two types of fixed abrasive pads (FAP)—raised and flat—were fabricated via UV curing for comparative lapping experiments, through which their underlying mechanisms were explored in ...
Zhankui Wang +9 more
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Effect of triethanolamine concentration on self-sharpening performance of fixed abrasive pad
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014李军 LI Jun +4 more
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Pattern Optimization for Phyllotactic Fixed Abrasive Pads Based on the Trajectory Method
IEEE Transactions on Semiconductor Manufacturing, 2017Fixed abrasive pads patterned with phyllotaxis theory of biology have been developed to be novel lapping and polishing pads. However, the influences of phyllotactic parameters on pad patterns were not deeply indicated. To design optimal pad patterns with fixed abrasives, the trajectory analysis method is adopted.
Congfu Fang, Zaixing Zhao, Zhongwei Hu
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Materials Science in Semiconductor Processing
Minghua Pang, Wang Zhankui, Lijie Ma
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Minghua Pang, Wang Zhankui, Lijie Ma
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Numerical simulation and experimental validation of fixed abrasive grinding pad topography
The International Journal of Advanced Manufacturing Technology, 2015The topography of fixed abrasive grinding pad has a significant effect on the process of grinding analysis. A new numerical modeling technique has been proposed to generate the grinding pad topography with spherical grains in this paper. The simulation result was given by software.
Pengfei Liu +4 more
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Pattern design of fixed abrasive pads inspired by the bee colony theory
The International Journal of Advanced Manufacturing Technology, 2018Textured fixed-abrasive pads (T-FAPs) are pads that can be realized via slotting, arranging pellets, etc.; these pads have the advantages of good lapping performance due to the geometrical patterns (GPs) on the pad surface. GPs have an influence on lapping performance due to the global distribution of fixed abrasives changed by the various GPs; this ...
Congfu Fang +4 more
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