The Fuzzy Comprehensive Evaluation of the Self-Conditioning of Hydrophilic Fixed-Abrasive Pad
Advanced Engineering Forum, 2018The self-conditioning of hydrophilic fixed abrasive lapping based on the principle of two-body (pad-wafer) abrasion has great importance on the MRR (material removal rate) of wafer. The physical and mechanical properties of pad were taken as set of available alternatives. Fuzzy comprehensive evaluation principle was applied to establish a model for the
Zhi Lan Ju, Yong Wei Zhu, Fu Bao Zhang
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Study of Pattern Density Effects in CMP Using Fixed Abrasive Pads
Journal of The Electrochemical Society, 2003Pattern density effects during chemical-mechanical planarization (CMP) for shallow trench isolation applications using fixed abrasive pads were investigated in this work. Wafers patterned with various test masks, having a mix of pattern densities, were polished, and their polishing characteristics are correlated to their respective pattern density ...
Venkata R. Gorantla +4 more
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Pattern design of fixed abrasive pads inspired by the bee colony theory
The International Journal of Advanced Manufacturing Technology, 2018Textured fixed-abrasive pads (T-FAPs) are pads that can be realized via slotting, arranging pellets, etc.; these pads have the advantages of good lapping performance due to the geometrical patterns (GPs) on the pad surface. GPs have an influence on lapping performance due to the global distribution of fixed abrasives changed by the various GPs; this ...
Congfu Fang +4 more
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Groove Influence on Lapping Quartz Glass with Fixed Abrasive Pad
ECS Journal of Solid State Science and TechnologyTo improve the lapping efficiency and process stability of quartz glass, this paper investigated the lapping mechanism of raised abrasive pads (RAP). Two types of fixed abrasive pads (FAP)—raised and flat—were fabricated via UV curing for comparative lapping experiments, through which their underlying mechanisms were explored in ...
Zhankui Wang +9 more
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Numerical simulation and experimental validation of fixed abrasive grinding pad topography
The International Journal of Advanced Manufacturing Technology, 2015The topography of fixed abrasive grinding pad has a significant effect on the process of grinding analysis. A new numerical modeling technique has been proposed to generate the grinding pad topography with spherical grains in this paper. The simulation result was given by software.
Pengfei Liu +4 more
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Lapping performance of fixed silicon-based agglomerated diamond abrasive pad
Optics and Precision Engineering, 2023Xin SHENG +4 more
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Study on Matrix Properties and Machining Performance of Fixed-Abrasive Pad
Laser & Optoelectronics Progress, 2011李锁柱 Li Suozhu +4 more
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Effect of triethanolamine in lapping spinel using fixed abrasive pad
Optics and Precision Engineering, 2015王占奎 WANG Zhan-kui +3 more
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A Study of Nano-Polishing of Injection Molds Using a Fixed Abrasive Pad
Key Engineering Materials, 2003Jae Young Choi +4 more
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Fixed abrasive lapping with flexible 3M Trizact diamond tile abrasive pads
Optifab 2025Christopher M. Russell +2 more
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