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ACS Nano, 2015 The successful application of focused electron (and ion) beam induced deposition techniques for the growth of nanowires on flexible and transparent polycarbonate films is reported here. After minimization of charging effects in the substrate, sub-100 nm-wide Pt, W, and Co nanowires have been grown and their electrical conduction is similar compared to ...
J M de Teresa, Soraya Sangiao
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Focused Electron Beam Induced Deposition of Gold and Rhodium
MRS Proceedings, 2000ABSTRACTElectron beam induced deposition with two noble metal precursors (Rhodium and Gold) having the same halogeno and trifluorophosphine ligands is presented. The deposit geometry of lines and freestanding bridges is discussed with respect to electron energy, beam shape, and backscattered electron distribution.
Hoffmann, Patrik +6 more
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Focused electron beam induced deposition meets materials science [PDF]
Microelectronic Engineering, 2018 Focused electron beam induced deposition (FEBID) is a direct-write method for the fabrication of nanostructures whose lateral resolution rivals that of advanced electron lithography but is in addition capable of creating complex three-dimensional nano-architectures.
Michael Huth, Fabrizio Porrati
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Fundamental Proximity Effects in Focused Electron Beam Induced Deposition
ACS Nano, 2011Fundamental proximity effects for electron beam induced deposition processes on nonflat surfaces were studied experimentally and via simulation. Two specific effects were elucidated and exploited to considerably increase the volumetric growth rate of this nanoscale direct write method: (1) increasing the scanning electron pitch to the scale of the ...
Harald, Plank +4 more
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Fabrication of nanofigures by focused electron beam-induced deposition
Thin Solid Films, 2004Contamination lithography has been performed on various metal substrates by focused electron beam-induced deposition (EBID) technique in a field emission scanning electron microscope (FE-SEM). We used pump oil (hydrocarbon) as precursors for EBID. It was found that the growth rate was independent of primary electron energy (500 to 30 keV) but was ...
Kazuyuki Ueda, Masamichi Yoshimura
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A critical literature review of focused electron beam induced deposition
Journal of Applied Physics, 2008 An extensive review is given of the results from literature on electron beam induced deposition. Electron beam induced deposition is a complex process, where many and often mutually dependent factors are involved. The process has been studied by many over many years in many different experimental setups, so it is not surprising that there is a great ...
Cornelis Wouter Hagen
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Ultralow-energy focused electron beam induced deposition
Applied Physics Letters, 1994We have studied focused electron beam induced deposition from W(CO)6 at beam primary energies between 20 and 0.06 keV. Submicrometer resolution with 4 nA beam current was maintained at very low primary energies using a retarding field configuration. Decomposition cross sections of W(CO)6 for primary energies below about 1 keV were found to be about a ...
P. C. Hoyle, J. R. A. Cleaver, H. Ahmed
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Focused electron beam-induced deposition at cryogenic temperatures
Journal of Materials Research, 2011Abstract
M. Bresin +3 more
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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2014
Abstract The main characteristics of focused electron beam induced deposition (FEBID) and focused ion beam induced deposition (FIBID) are presented. FEBID and FIBID are two nanopatterning techniques that allow the fabrication of submicron patterns with nanometer resolution on selected locations of any kind of substrate, even on highly structured ...
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Abstract The main characteristics of focused electron beam induced deposition (FEBID) and focused ion beam induced deposition (FIBID) are presented. FEBID and FIBID are two nanopatterning techniques that allow the fabrication of submicron patterns with nanometer resolution on selected locations of any kind of substrate, even on highly structured ...
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Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2011The authors use focused electron-beam-induced Pt deposition from a gaseous (CH3)3CH3C5H4Pt precursor for the fabrication of electrically conductive structures consisting of Pt nanocrystals embedded in a carbon containing matrix. Recently it has been demonstrated that the electrical resistivity of such deposits can be strongly improved via postgrowth ...
Harald Plank +6 more
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