Results 231 to 240 of about 8,377,275 (245)

Binary Pt–Si Nanostructures Prepared by Focused Electron-Beam-Induced Deposition

ACS Nano, 2011
Binary systems of Pt-Si are prepared by electron-beam-induced deposition using the two precursors, trimethyl(methylcyclopentadienyl)platinum(IV) (MeCpPt(Me)(3)) and neopentasilane (Si(SiH(3))(4)), simultaneously. By varying the relative flux of the two precursors during deposition, we are able to study composites containing platinum and silicon in ...
Michael Huth, Fabrizio Porrati, Andreas Terfort   +2 more
exaly   +3 more sources

Electron range effects in focused electron beam induced deposition of 3D nanostructures

Microelectronic Engineering, 2006
We present evidence that the penetration of electrons in solids, typically a few micrometers at the usual acceleration voltages used in electron microscopes, influences the shape of sub-microstructures created by focused electron beam induced deposition.
Patrik Hoffmann, Ivo Utke
exaly   +2 more sources

Periodic structure formation by focused electron-beam-induced deposition

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2004
Focused electron-beam-induced deposition from a copper precursor is shown to allow self-formation of periodic features when the beam is scanned at lateral speeds of the order of the vertical deposition rate. The period of the structures can be tuned by the scan speed.
T. Bret, I. Utke, C. Gaillard, P. Hoffmann   +3 more
openaire   +1 more source

Focused Electron-Beam-Induced Deposition of 3 nm Dots in a Scanning Electron Microscope

Nano Letters, 2009
Electron-beam-induced deposition allows the creation of three-dimensional nanodevices within a scanning electron microscope. Typically the dimensions of the fabricated structure are from 20 nm to several micrometers. Until now the record for the smallest deposited feature in an SEM was 3.5 nm, measured by an indirect method.
Leon, van Kouwen, Aurelien, Botman, Cornelis W, Hagen   +2 more
openaire   +2 more sources

Direct-Write Deposition and Focused-Electron-Beam-Induced Purification of Gold Nanostructures

ACS Applied Materials & Interfaces, 2015
Three-dimensional gold (Au) nanostructures offer promise in nanoplasmonics, biomedical applications, electrochemical sensing and as contacts for carbon-based electronics. Direct-write techniques such as focused-electron-beam-induced deposition (FEBID) can provide such precisely patterned nanostructures.
Belić, Domagoj, Shawrav, Mostafa M., Gavagnin, Marco, Stöger-Pollach, Michael, Wanzenboeck, Heinz D., Bertagnolli, Emmerich   +5 more
openaire   +3 more sources

Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies

Coordination Chemistry Reviews, 2022
Petra Swiderek
exaly  

Combined Focused Electron Beam-Induced Deposition and Etching for the Patterning of Dense Lines without Interconnecting Material

Micromachines, 2021
Pieter Kruit, Cornelis Wouter Hagen, Sangeetha Hari   +2 more
exaly  

Focused electron beam induced deposition of pure SIO 2

SPIE Proceedings, 2007
Alexandre Perentes, Patrik Hoffmann, Frans Munnik   +2 more
openaire   +1 more source

Sub-10 nm focused electron beam induced deposition

2008
Work started with a critical review of literature from the past 70-odd years. The review shows that the physical processes occurring in EBID are generally well understood. By combining models for electron scattering in a solid and electron beam induced heating and knowledge of growth regimes, the majority of the experimental results was explained ...
openaire   +1 more source

Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition

ACS Nano, 2016
Robert Winkler, Michael Stanford, Jason Fowlkes   +2 more
exaly