Evaluation of Hydrogen Gettering Rates Correlated to Surface Composition and Texture of Nickel-Plated Zircaloy Getters of Different Heat Treatment Procedures [PDF]
Molecules, 2023 Coatings of metal specimens are known to have an impact on hydrogen gettering (hydrogen absorption). The coating can have one or more functions, such as enhancing gettering, preventing gettering and/or preventing oxidation of the metal substrate.
Ewa C. E. Rönnebro +5 more
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Reduction of White Spot Defects in CMOS Image Sensors Fabricated Using Epitaxial Silicon Wafer with Proximity Gettering Sinks by CH2P Molecular Ion Implantation [PDF]
Sensors, 2022 Using a new implantation technique with multielement molecular ions consisting of carbon, hydrogen, and phosphorus, namely, CH2P molecular ions, we developed an epitaxial silicon wafer with proximity gettering sinks under the epitaxial silicon layer to ...
Takeshi Kadono +8 more
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Reduction of Dark Current in CMOS Image Sensor Pixels Using Hydrocarbon-Molecular-Ion-Implanted Double Epitaxial Si Wafers [PDF]
Sensors, 2020 The impact of hydrocarbon-molecular (C3H6)-ion implantation in an epitaxial layer, which has low oxygen concentration, on the dark characteristics of complementary metal-oxide-semiconductor (CMOS) image sensor pixels was investigated by dark current ...
Ayumi Onaka-Masada +7 more
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Reduction in Dark Current in Photodiodes: A Review [PDF]
MicromachinesDark current represents a fundamental limiting factor in photodiode performance, establishing the noise floor and constraining detectivity in low-light applications.
Alper Ülkü +7 more
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Proximity Gettering Design of Hydrocarbon–Molecular–Ion–Implanted Silicon Wafers Using Dark Current Spectroscopy for CMOS Image Sensors [PDF]
Sensors, 2019 We developed silicon epitaxial wafers with high gettering capability by using hydrocarbon−molecular−ion implantation. These wafers also have the effect of hydrogen passivation on process-induced defects and a barrier to out-diffusion of ...
Kazunari Kurita +7 more
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Development and Characterization of Non-Evaporable Getter Thin Films with Ru Seeding Layer for MEMS Applications [PDF]
Micromachines, 2018 Mastering non-evaporable getter (NEG) thin films by elucidating their activation mechanisms and predicting their sorption performances will contribute to facilitating their integration into micro-electro-mechanical systems (MEMS). For this aim, thin film
El-Mostafa Bourim +2 more
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Enhancing parameters of silicon varactors using laser gettering
Tekhnologiya i Konstruirovanie v Elektronnoi Apparature, 2018 The authors investigate how and why defects influence the inverse characteristics of varactors. The paper presents experimental results on the effect laser gettering has on the electrical parameters of varactors.
I. M. Vikulin +5 more
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Modern Electronic Materials, 2019 Gettering of rapidly diffusing metallic impurities and structural defects in silicon which is the main material for IC fabrication, high-power high-voltage devices and neutron doped silicon has been studied.
Vyacheslav A. Kharchenko
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IEEE Journal of the Electron Devices Society, 2022 We have developed silicon epitaxial wafers with high gettering capability using hydrocarbon molecular ion implantation for advanced Complementary Metal-Oxide-Semiconductor (CMOS) image sensors. These wafers have three unique silicon wafer characteristics
Kazunari Kurita +9 more
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Influence of gettering on aluminum ohmic contact formation [PDF]
Tekhnologiya i Konstruirovanie v Elektronnoi Apparature, 2020 The study considers the reasons and mechanisms of degradation of reverse characteristics of varicaps with aluminum-based ohmic contacts. The authors present and analyze the experimental results on how gettering affects the reverse current of varicaps, as
Litvinenko V. N. +3 more
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