Transition Mode Control in Reactive High-Power Impulse Magnetron Sputtering (R-HiPIMS)
Tetsuhide SHIMIZU +4 more
openaire +2 more sources
A Comparison of High-Impulse and Direct-Current Magnetron Sputtering Processes for the Formation of Effective Bactericidal Oxide Coatings on Polymer Substrates. [PDF]
Kacprzyńska-Gołacka J +9 more
europepmc +1 more source
A novel method to deposit Copper Indium Gallium Diselenide (CIGS) using High Power Impulse Magnetron Sputtering (HIPIMS) was demonstrated and compared to the existing DC magnetron sputtering process.
Welsh, A. +6 more
core
Advances in Doping Modification and Processing of Diamond-like Carbon Coatings: A Review. [PDF]
Zhang Z +4 more
europepmc +1 more source
Influence of Substrate Manufacturing Route on HiPIMS TiAlSiN-Coated AISI 316L Stainless Steel Produced by Laser Powder Bed Fusion. [PDF]
Kočiško M +5 more
europepmc +1 more source
Graphite-like carbon films by high power impulse magnetron sputtering
tHigh-power impulse magnetron sputtering (HiPIMS), coupled with a direct-current magnetron sputter-ing (dcMS) in parallel, was employed to fabricate graphite-like amorphous carbon (GLC) films.
黄美东 +2 more
core
Tailoring the Microstructure and Properties of HiPIMS-Deposited DLC-Cr Nanocomposite Films via Chromium Doping. [PDF]
Ding J +7 more
europepmc +1 more source
Reactive magnetron sputtering : from fundamentals to high deposition rate processes
Reactive magnetron sputtering is widely used for synthesis of various compound thin films. The technique is very versatile and scalable. Especially in industry, high productivity is essential and there is a need for processes with high deposition rates ...
Kubart, Tomas
core
TiN Plasmonic Metamaterial Arrays Fabricated at Low Temperatures on Versatile Substrates. [PDF]
Bower R +9 more
europepmc +1 more source
Sputter-Deposited Superconducting Thin Films for Use in SRF Cavities. [PDF]
Lakki Reddy Venkata BR +2 more
europepmc +1 more source

